 lixiang
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b67769ec2c
ui优化
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9 months ago |
|
lixiang
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99d939492e
1.加登出界面
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10 months ago |
|
lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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10 months ago |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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11 months ago |
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lixiang
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9163903164
Kepler2200优化
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11 months ago |
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lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
 hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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lixiang
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95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 year ago |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
|
lixiang
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818383115c
UI优化
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1 year ago |
|
lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
 sangwq
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d89a4c81f9
Enhance Routing algorithm and simulator configure file path.
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1 year ago |
|
lixiang
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dbf06a2134
添加TM Operation界面
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1 year ago |
|
lixiang
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39fe214261
1.完善PartialPressure 功能
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2 years ago |
|
lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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75710d35d8
RF Match.
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2 years ago |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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lixiang
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ccb4444fa8
添加部分ui按钮控制rt功能
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 years ago |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 years ago |
