 lixiang
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477c4954ad
1.添加CarrierId
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8 meses atrás |
|
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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8 meses atrás |
|
lixiang
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b67769ec2c
ui优化
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8 meses atrás |
|
lixiang
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65d80057c2
ui优化
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9 meses atrás |
|
lixiang
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99d939492e
1.加登出界面
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9 meses atrás |
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lixiang
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ced69ea3b9
新版本Recioeview界面开发
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9 meses atrás |
|
lixiang
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df2593530e
1.提交cycle功能
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9 meses atrás |
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lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 meses atrás |
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lixiang
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5ce110574e
1，添加cooling功能
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10 meses atrás |
|
lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 meses atrás |
|
lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 meses atrás |
|
lixiang
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e81e8a5c12
IoSensor和管路 优化
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10 meses atrás |
|
lixiang
|
9163903164
Kepler2200优化
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10 meses atrás |
|
lixiang
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c671c999c0
ui界面优化
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11 meses atrás |
|
lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 meses atrás |
|
lixiang
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d33079596b
1.优化新版跑片动画
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11 meses atrás |
|
lixiang
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7513d2e586
TM View 添加wafer
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11 meses atrás |
|
lixiang
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8d613c7d1f
奈思UI 新版动画
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11 meses atrás |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 ano atrás |
 hecl
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0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
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1 ano atrás |
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hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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1 ano atrás |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 ano atrás |
|
lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 ano atrás |
|
lixiang
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6d84fd8e38
修复UI LP2/LP3不能工作 bug
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1 ano atrás |
|
lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 ano atrás |
|
lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 ano atrás |
|
lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 ano atrás |
|
lixiang
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1929a3510b
1.新版ui界面开发
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1 ano atrás |
|
lixiang
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e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 ano atrás |
|
lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 ano atrás |
