 zhouhr
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6748e4b29b
fix the bug in UnloadRoutine as the name of vce InnerDoor is fixed.
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11 月之前 |
|
zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 月之前 |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 月之前 |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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11 月之前 |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 年之前 |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 年之前 |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 年之前 |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 年之前 |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 年之前 |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 年之前 |
|
zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 年之前 |
