 zhouhr
|
6748e4b29b
fix the bug in UnloadRoutine as the name of vce InnerDoor is fixed.
|
преди 11 месеца |
|
zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
преди 11 месеца |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
преди 11 месеца |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
преди 11 месеца |
 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
преди 1 година |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
преди 1 година |
|
zhouhr
|
e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
|
преди 1 година |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
преди 1 година |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
преди 1 година |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
преди 1 година |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
преди 1 година |
