 sangwq
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
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sangwq
|
2826cd9348
Enhance the duplicated wafer function.
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1 year ago |
|
sangwq
|
2de3872723
duplicated wafer function.
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1 year ago |
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sangwq
|
52349cad2b
Duplicated wafer functions.
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1 year ago |
 lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
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1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
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1 year ago |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
1 year ago |
|
sangwq
|
2694bdc96c
Enhance the Pre-rotation function
|
1 year ago |
|
sangwq
|
baeae1636e
TM Robot PreRotation function for particle and throughput issues.
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1 year ago |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
 zhouhr
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37bbeb95df
Add the configuration item QueryAWCOption to determine whether TMRobot AWC collects data && Add TMRobot Pick query AWC
|
1 year ago |
|
zhouhr
|
ca6cc2acfb
Add WaferOffset related pages, drivers, acquisition logic, and simulator.
|
1 year ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
1 year ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
1 year ago |
|
lixiang
|
1a9114214b
robot place 删除测试代码
|
1 year ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
1 year ago |
|
lixiang
|
072e5d0d01
ui Module TM 名变TMRobot
|
1 year ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
1 year ago |
|
sangwq
|
2663cfc1d9
Add place/pick delay.
|
1 year ago |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
1 year ago |
|
sangwq
|
b741650da1
TM Cycle ready.
|
1 year ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
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a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
