 sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
il y a 1 an |
|
sangwq
|
88b91b4ea3
fix routing bugs.
|
il y a 1 an |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
|
il y a 1 an |
|
sangwq
|
61173b6866
Added Auto Vent/Pump log for tracing trigger issue.
|
il y a 1 an |
|
sangwq
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
il y a 1 an |
|
sangwq
|
75314148f5
Added Auto Pump/vent option.
|
il y a 1 an |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
il y a 1 an |
|
sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
il y a 1 an |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
il y a 1 an |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
il y a 1 an |
|
sangwq
|
5fc13b3f0c
New Efem design
|
il y a 1 an |
