 hecl
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5396e84cfe
VenusSE TM io simulator update
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il y a 1 an |
 lixiang
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a2426eb90b
Recipe 添加bias step ramp设值功能
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il y a 1 an |
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hecl
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afc3b9494f
VenusSE TM pressurecontrol update
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il y a 1 an |
 zhouhr
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b3948aca8e
Update driver of HongHuVce,log in LoadPrepareRoutine && fix VenusSeOperationOverView
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il y a 1 an |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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il y a 1 an |
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lixiang
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b253c8fadd
1.添加旋转动画
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il y a 1 an |
 Intern01
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81bc054dc3
fix bugs
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il y a 1 an |
|
Intern01
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dfc9174ac8
VenusSE TM PM Simulator Update
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il y a 1 an |
 sangwq
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2694bdc96c
Enhance the Pre-rotation function
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il y a 1 an |
|
sangwq
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baeae1636e
TM Robot PreRotation function for particle and throughput issues.
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il y a 1 an |
|
lixiang
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0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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il y a 1 an |
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sangwq
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
|
zhouhr
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5a02e70af1
fix jetefem bug
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il y a 1 an |
|
zhouhr
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d396d70f90
fix JetEfem bug
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il y a 1 an |
|
zhouhr
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279481d66f
add missing files
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il y a 1 an |
|
zhouhr
|
9a91105192
add missing files
|
il y a 1 an |
|
zhouhr
|
1c44773767
Add missing files
|
il y a 1 an |
|
zhouhr
|
1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
|
il y a 1 an |
|
lixiang
|
de2f4fea7e
优化abort下拉功能
|
il y a 1 an |
|
sangwq
|
0a0308458e
Enable drag wafer while module offline.
|
il y a 1 an |
|
lixiang
|
f1c36cc209
添加提交
|
il y a 1 an |
|
lixiang
|
5139f41e19
添加PM Abort 下拉菜单功能
|
il y a 1 an |
|
sangwq
|
a8ee956c5e
Fixed the Cycle Wafer Count and throughput calculation bugs.
|
il y a 1 an |
|
sangwq
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acf413cdc1
fixed routine runner delay bugs.
|
il y a 1 an |
|
sangwq
|
40f00c8ab1
fixed routine runner default delay bug.
|
il y a 1 an |
|
sangwq
|
29a50a4986
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
il y a 1 an |
|
sangwq
|
b79251cf32
fix end step delay bug.
|
il y a 1 an |
|
lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
|
il y a 1 an |
|
zhouhr
|
37bbeb95df
Add the configuration item QueryAWCOption to determine whether TMRobot AWC collects data && Add TMRobot Pick query AWC
|
il y a 1 an |
|
zhouhr
|
0ed42d17d1
fix bugs for WaferOffset
|
il y a 1 an |
