 lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 year ago |
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lixiang
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b1e6a9ce63
bug提交
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1 year ago |
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lixiang
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649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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1 year ago |
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lixiang
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b5616b7378
解决冲突，合并代码
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1 year ago |
 zhouhr
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efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
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1 year ago |
 sangwq
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3f1379ff57
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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1 year ago |
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sangwq
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d49b8f65dd
fix the RouteManager instance initialize bug.
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1 year ago |
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lixiang
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1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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1 year ago |
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sangwq
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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1 year ago |
|
lixiang
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46aa26403c
优化压差开siltdoor功能
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1 year ago |
|
lixiang
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5888197193
1.efem 添加 foup load/unload动画
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1 year ago |
|
lixiang
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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1 year ago |
|
sangwq
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7b98756c26
兼容新旧 Endpoint, 未完成
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1 year ago |
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sangwq
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aaf8372896
兼容 两种 endpoint, 未完成
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1 year ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
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1 year ago |
|
lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
|
lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
