 zhouhr
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4dc245305f
change ValveType
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il y a 1 an |
 lixiang
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3f2b687dbc
1.数据库加入Run Recipe失败数据
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il y a 1 an |
|
zhouhr
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efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
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il y a 1 an |
 Intern01
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171eef8acc
Add to chart@@to slot switch page function
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il y a 1 an |
|
lixiang
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ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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il y a 1 an |
|
lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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il y a 1 an |
 sangwq
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501997ac38
TM/EFEM robot single arm option.
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il y a 1 an |
|
lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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il y a 1 an |
|
zhouhr
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c71aa92a49
add time on Topview
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il y a 1 an |
|
zhouhr
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4ed3a26b1b
add Combox Style for TM/LoadLock Operation
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il y a 1 an |
|
zhouhr
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f11765e064
Add TMHome abort
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il y a 1 an |
|
zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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il y a 1 an |
|
sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
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il y a 1 an |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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il y a 1 an |
|
zhouhr
|
1e8077cb6e
Add the driver of HongHuVR
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il y a 1 an |
|
lixiang
|
e0817cb012
现场bug修改
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il y a 1 an |
|
zhouhr
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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il y a 1 an |
|
sangwq
|
587a0094b4
fix logic error.
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il y a 1 an |
|
sangwq
|
9ba5d70aff
fix abort manual transfer bug.
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il y a 1 an |
|
sangwq
|
2b6f4986f3
fix Efemrobot scheduler bug.
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il y a 1 an |
|
sangwq
|
3f1379ff57
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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il y a 1 an |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
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il y a 1 an |
|
lixiang
|
1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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il y a 1 an |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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il y a 1 an |
|
lixiang
|
a62816fc3f
优化efem
|
il y a 1 an |
|
lixiang
|
9f512c69c9
优化efem动画
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il y a 1 an |
|
Intern01
|
987f0abae5
1.Slove TuroN2Flow don't show problem
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il y a 1 an |
|
sangwq
|
8d21b41b42
AutoCycle enhancement.
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il y a 1 an |
|
lixiang
|
46aa26403c
优化压差开siltdoor功能
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il y a 1 an |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
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il y a 1 an |
