 lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
11 mesi fa |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
11 mesi fa |
|
lixiang
|
9163903164
Kepler2200优化
|
11 mesi fa |
 sangwq
|
2de3872723
duplicated wafer function.
|
1 anno fa |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 anno fa |
 hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 anno fa |
|
sangwq
|
b85b9aa79f
fix some routing bugs.
|
1 anno fa |
|
sangwq
|
709c7a1c10
fixed the routing bug while B In B Out.
|
1 anno fa |
 chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
|
1 anno fa |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 anno fa |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 anno fa |
|
sangwq
|
ec2f97e62d
enhance log.
|
1 anno fa |
|
lixiang
|
e511d1f387
1.添加PM控压功能
|
1 anno fa |
 zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
1 anno fa |
|
zhouhr
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
|
1 anno fa |
|
sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
1 anno fa |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
1 anno fa |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
1 anno fa |
 yangdb
|
045eae5c75
1.sequence和recipe修改日志输出格式
|
1 anno fa |
 Intern01
|
23c59d3c86
1.完成FA模块的功能开发
|
1 anno fa |
|
sangwq
|
f211c4242f
Efem module raw design.
|
1 anno fa |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
2 anni fa |
|
sangwq
|
44ec74603f
TM Transfer
|
2 anni fa |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 anni fa |
|
lixiang
|
f48943cfd1
解决冲突
|
2 anni fa |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 anni fa |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 anni fa |
|
lixiang
|
7a6556869f
1.整理主界面UI
|
2 anni fa |
|
sangwq
|
096c873956
Sequence SPEC update.
|
2 anni fa |
|
sangwq
|
46261ca338
enhance wafer manager.
|
2 anni fa |
