 zhouhr
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4666252058
补充recipe界面不显示heliumpump的问题
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5 months ago |
|
zhouhr
|
b6309f712c
upload for Venus SE/DE
|
5 months ago |
 lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
6 months ago |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
6 months ago |
|
lixiang
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
7 months ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
7 months ago |
|
lixiang
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
|
8 months ago |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
8 months ago |
|
lixiang
|
b67769ec2c
ui优化
|
8 months ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 months ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
10 months ago |
|
lixiang
|
9163903164
Kepler2200优化
|
10 months ago |
 hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
10 months ago |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 months ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
11 months ago |
|
hecl
|
ca830385e4
Fix bug
|
11 months ago |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
11 months ago |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
11 months ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
1 year ago |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
1 year ago |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
|
1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
|
lixiang
|
87f1121180
1.Recipe UI 界面Name优化
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
