 sangwq
|
a244b205b9
Gas Flow and RF Power routine.
|
2 years ago |
 lixiang
|
ccb4444fa8
添加部分ui按钮控制rt功能
|
2 years ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
|
lixiang
|
6579ef1d85
解决冲突
|
2 years ago |
|
lixiang
|
3b8277256c
1.recipeHead添加expand
|
2 years ago |
|
sangwq
|
4e8a55f733
Endpoint Module.
|
2 years ago |
|
sangwq
|
f03c15cdaa
remove old epd.
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
f8cec9a940
epd files missing.
|
2 years ago |
|
sangwq
|
0df76f75a5
obsolete output folder
|
2 years ago |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
lixiang
|
5e89c4da73
优化recipe代码
|
2 years ago |
|
sangwq
|
0050803370
update process Module
|
2 years ago |
|
lixiang
|
ee80e1676c
解决冲突
|
2 years ago |
|
lixiang
|
da4e6f6a4e
Recipe功能完善
|
2 years ago |
|
sangwq
|
0606b882bc
process module 1215
|
2 years ago |
|
sangwq
|
5d23b42797
recipe
|
2 years ago |
|
lixiang
|
f4683476ce
添加Output
|
2 years ago |
|
lixiang
|
f3ae3aeca8
添加recipe添加修改界面
|
2 years ago |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 years ago |
|
lixiang
|
65b982deaf
优化漏气check界面
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
lixiang
|
93a863cbc0
overView流气功能提交
|
2 years ago |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 years ago |
|
lixiang
|
081ab4daa5
添加多个UI界面
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
64c7ef574e
log
|
3 years ago |
|
lixiang
|
b2b62fcc6b
添加LogEnum功能
|
3 years ago |
|
lixiang
|
96e7a181a9
修改数据库无法连接的bug
|
3 years ago |
