 lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
|
9 kuukautta sitten |
 sangwq
|
5163d9153b
Fix the double place to lp bug while destinations are different loadports.
|
9 kuukautta sitten |
|
sangwq
|
a81c73cdbf
Enhance Venus routing algorithm for clean task.
|
9 kuukautta sitten |
|
sangwq
|
ec6ba70d8e
Parallel routing algorithm for kepler/venus.
|
9 kuukautta sitten |
|
sangwq
|
5469baaa63
Parallel cycle mode
|
9 kuukautta sitten |
 zhouhr
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
|
9 kuukautta sitten |
|
lixiang
|
465f0690e7
Cooling功能bug修复
|
9 kuukautta sitten |
|
lixiang
|
9fdde379d4
cooling加条件限制
|
9 kuukautta sitten |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
9 kuukautta sitten |
|
sangwq
|
8a8ff0ced1
Fixed the cycle blocking bug with one wafer per cycle.
|
9 kuukautta sitten |
 kuangzl
|
eaf2ce039b
Added PMChamberLabel display for VenusDE and VenusSE.
|
9 kuukautta sitten |
|
kuangzl
|
7631216206
Improve the animation of SE Robot, modify Venus SE UI, complete casette load animation.
|
9 kuukautta sitten |
 chenkui
|
83714d769e
add vce module SafeLoad/SafeUnload/Map function
|
9 kuukautta sitten |
|
kuangzl
|
f56adfe739
Upload missing code and remove the PM pressure display.
|
9 kuukautta sitten |
|
chenkui
|
25954d684c
update EquipmentVariables.xml and Secsgem dll
|
9 kuukautta sitten |
|
kuangzl
|
a971969e35
Modify the UI of VenusDE and fix the ReturnWafer Button.
|
9 kuukautta sitten |
|
kuangzl
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
9 kuukautta sitten |
|
sangwq
|
3b1932fced
Add Loadport loaded check while manual transfer wafer.
|
9 kuukautta sitten |
|
sangwq
|
ed2162b82c
Fix the PreClean/PostClean disorder bug.
|
9 kuukautta sitten |
|
sangwq
|
09e8c5db30
Fix the post clean not running bug.
|
9 kuukautta sitten |
|
sangwq
|
260120e0d5
Change the PreClean/PostClean design.
|
9 kuukautta sitten |
|
zhouhr
|
4269c343ba
upload missing files..
|
10 kuukautta sitten |
|
zhouhr
|
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
|
10 kuukautta sitten |
|
zhouhr
|
eff7f8a03e
upload missing files
|
10 kuukautta sitten |
|
zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 kuukautta sitten |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
10 kuukautta sitten |
 hecl
|
4b1a37ee73
fix bugs
|
10 kuukautta sitten |
|
hecl
|
f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
|
10 kuukautta sitten |
|
hecl
|
31019683d7
1.Venus MFCVerification UI enhance
|
10 kuukautta sitten |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 kuukautta sitten |
