 lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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il y a 9 mois |
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lixiang
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5ce110574e
1，添加cooling功能
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il y a 9 mois |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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il y a 10 mois |
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lixiang
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9163903164
Kepler2200优化
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il y a 10 mois |
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lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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il y a 10 mois |
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lixiang
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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il y a 10 mois |
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lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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il y a 11 mois |
 sangwq
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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il y a 1 an |
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lixiang
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caba8d94c6
Duplicated Wafer UI显示
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il y a 1 an |
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sangwq
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2826cd9348
Enhance the duplicated wafer function.
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il y a 1 an |
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sangwq
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2de3872723
duplicated wafer function.
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il y a 1 an |
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sangwq
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52349cad2b
Duplicated wafer functions.
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il y a 1 an |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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il y a 1 an |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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il y a 1 an |
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lixiang
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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il y a 1 an |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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il y a 1 an |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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lixiang
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1929a3510b
1.新版ui界面开发
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il y a 1 an |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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il y a 1 an |
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sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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il y a 1 an |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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il y a 1 an |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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il y a 1 an |
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lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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il y a 1 an |
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sangwq
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03063bae6a
Enhance the routine framework.
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il y a 1 an |
 zhouhr
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37bbeb95df
Add the configuration item QueryAWCOption to determine whether TMRobot AWC collects data && Add TMRobot Pick query AWC
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il y a 1 an |
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sangwq
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8f9b95ae8f
Develop transfer cycle.
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il y a 1 an |
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lixiang
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072e5d0d01
ui Module TM 名变TMRobot
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il y a 1 an |
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sangwq
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8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
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il y a 1 an |
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sangwq
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2663cfc1d9
Add place/pick delay.
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il y a 1 an |
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sangwq
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ed992dd631
Enhance the Log Info
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il y a 1 an |
