 lixiang
|
ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
|
2 years ago |
 Intern01
|
987f0abae5
1.Slove TuroN2Flow don't show problem
|
2 years ago |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
2 years ago |
 zhouhr
|
bcc9d2faf8
1、Chamber add the waferID
|
2 years ago |
|
lixiang
|
708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
|
2 years ago |
|
zhouhr
|
296cd4b8a4
1、recipe页面chuck、dechuck选项名称缩略并设置最大最小长度
|
2 years ago |
|
lixiang
|
cb91599d02
修复recipe Ui信息显示
|
2 years ago |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
2 years ago |
