 lixiang
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179f80c29a
1.endpoint by wcf 添加修改配置文件界面
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2 years ago |
|
lixiang
|
93b4531b7b
robot 不能home问题提交
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2 years ago |
 Intern01
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c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
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2 years ago |
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lixiang
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6dd42b5fb0
添加process数据分析功能
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2 years ago |
 sangwq
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16f00701e5
Redesign Recipe module.
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2 years ago |
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sangwq
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f211c4242f
Efem module raw design.
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
|
lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
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sangwq
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6187ad5b4f
Interlock 优化
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2 years ago |
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sangwq
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46261ca338
enhance wafer manager.
|
2 years ago |
|
sangwq
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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sangwq
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a244b205b9
Gas Flow and RF Power routine.
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2 years ago |
|
sangwq
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c3154ba629
wafer manager.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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d8e5f1dc2c
2022 last update
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2 years ago |
|
lixiang
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ee80e1676c
解决冲突
|
2 years ago |
|
sangwq
|
0606b882bc
process module 1215
|
2 years ago |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 years ago |
