 lixiang
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6d9d4bce31
efem界面添加loadport联动rt功能
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2 years ago |
|
lixiang
|
2cc409c5f8
合并代码
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2 years ago |
 sangwq
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9f239420d8
improve the efem code.
|
2 years ago |
|
sangwq
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f5ee1dcbf1
fix loadport routine bugs.
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2 years ago |
|
lixiang
|
85fc03f838
1.添加部分OpertionOverView ui功能
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2 years ago |
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sangwq
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60d1bca02a
update cycle module, not finished.
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2 years ago |
|
lixiang
|
179f80c29a
1.endpoint by wcf 添加修改配置文件界面
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2 years ago |
|
sangwq
|
996ec07542
EPD BUG.
|
2 years ago |
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sangwq
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e8f7e93461
EPD
|
2 years ago |
|
lixiang
|
f3bd6b016b
添加部分efem功能
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2 years ago |
|
sangwq
|
7b98756c26
兼容新旧 Endpoint, 未完成
|
2 years ago |
|
sangwq
|
aaf8372896
兼容 两种 endpoint, 未完成
|
2 years ago |
|
lixiang
|
a8582aeee2
修复配置文件不能修改bug
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2 years ago |
|
sangwq
|
68c484e4c3
兼容去胶机使用的Endpoint.
|
2 years ago |
|
lixiang
|
1a9114214b
robot place 删除测试代码
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2 years ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
|
sangwq
|
f6ac5e975e
Siasun robot new line chars are "\r\n"
|
2 years ago |
|
lixiang
|
e63db2ef65
提交
|
2 years ago |
|
lixiang
|
93b4531b7b
robot 不能home问题提交
|
2 years ago |
|
lixiang
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
2 years ago |
|
sangwq
|
d900c241bd
开发 AutoCycle 模块， 进行中
|
2 years ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
|
2 years ago |
|
lixiang
|
334e242cf0
修改wafer样式
|
2 years ago |
|
lixiang
|
a98fe05338
再次提交
|
2 years ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
2 years ago |
 yangdb
|
69ce19d6d6
1.sequence控件移除多余的dll引用
|
2 years ago |
 Intern01
|
5c0e111942
解决冲突
|
2 years ago |
|
lixiang
|
546436c2c7
模拟器读取chamber bug修改
|
2 years ago |
|
Intern01
|
c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
|
2 years ago |
|
yangdb
|
045eae5c75
1.sequence和recipe修改日志输出格式
|
2 years ago |
