 zhouhr
|
3b9c2c346d
1. add missing item in SE/DE Sccfg
|
il y a 8 mois |
|
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
il y a 8 mois |
|
zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
il y a 10 mois |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
il y a 10 mois |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
il y a 11 mois |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 1 an |
 lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
il y a 1 an |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
il y a 1 an |
 sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
il y a 1 an |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
il y a 1 an |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
il y a 1 an |
 chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
il y a 1 an |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
|
il y a 1 an |
|
lixiang
|
f09d7d1b15
分开所有系列配置文件
|
il y a 1 an |
