 sangwq
|
991036681f
enhance the duplicated wafer functions.
|
1 gadu atpakaļ |
 lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 gadu atpakaļ |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 gadu atpakaļ |
|
sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 gadu atpakaļ |
|
sangwq
|
271930f900
minor change.
|
1 gadu atpakaļ |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
1 gadu atpakaļ |
|
sangwq
|
46261ca338
enhance wafer manager.
|
2 gadi atpakaļ |
|
sangwq
|
56cd0ab611
add framework
|
2 gadi atpakaļ |
