 lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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7 months ago |
 zhouhr
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82d289e21c
1. add the function of WTWClean by WTWInterval
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8 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
9 months ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
10 months ago |
|
lixiang
|
a9d8e56970
1.扩展alarm list
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10 months ago |
|
lixiang
|
e29f6e8e46
1.优化UI界面性能
|
10 months ago |
|
lixiang
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
|
11 months ago |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
11 months ago |
|
lixiang
|
b67769ec2c
ui优化
|
11 months ago |
|
zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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11 months ago |
|
lixiang
|
99d939492e
1.加登出界面
|
1 year ago |
 sangwq
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5687e44ebc
Enhance routing algorithm.
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
 hecl
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4b1a37ee73
fix bugs
|
1 year ago |
|
hecl
|
f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
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1 year ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
hecl
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
1 year ago |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
|
1 year ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
1 year ago |
|
zhouhr
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
|
1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
|
1 year ago |
|
lixiang
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
|
1 year ago |
