 lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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7 months ago |
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lixiang
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1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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7 months ago |
 zhouhr
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82d289e21c
1. add the function of WTWClean by WTWInterval
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8 months ago |
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zhouhr
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b8540e3e4c
1. fix the bug in VenusRecipeSequenceSelectView
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8 months ago |
|
zhouhr
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dba64f7240
1. add the driver of SunWayVPA && the item in config/setmentity
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8 months ago |
|
zhouhr
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79d5e939e3
1. show the choice of AutoUnLoad
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8 months ago |
|
zhouhr
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9e1a79673e
1. add the item of AutoUnLoad for Job
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8 months ago |
|
lixiang
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b113f691ee
添加Carrier ID
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8 months ago |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
|
zhouhr
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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8 months ago |
|
zhouhr
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149c7ce2e9
add AutoPump before StartJob && AutoUnLoad after JobDone && VCELoad Without PumpDown
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8 months ago |
|
zhouhr
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b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
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8 months ago |
|
zhouhr
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4666252058
补充recipe界面不显示heliumpump的问题
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8 months ago |
|
zhouhr
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fd27ba4304
handle some bug.
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8 months ago |
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zhouhr
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b6309f712c
upload for Venus SE/DE
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8 months ago |
|
lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
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8 months ago |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
9 months ago |
|
lixiang
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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9 months ago |
 chenkui
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9ffd49dd2d
update pp-select object[] to string[] bug
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9 months ago |
 sangwq
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bcb1461e22
Routing bug while single PM and double arm running.
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9 months ago |
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sangwq
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3a49881f33
fix the typing error.
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9 months ago |
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sangwq
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81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
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10 months ago |
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sangwq
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e12c5e5a93
fixed the blocking bug while return wafers.
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10 months ago |
|
chenkui
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4edd963b4b
update S2F13 ECID
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10 months ago |
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sangwq
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d449c55208
Force Loadlock cooling while return wafer.
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10 months ago |
|
lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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10 months ago |
|
chenkui
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e874919d1b
update ECID
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10 months ago |
|
chenkui
|
9c5f7f760b
修复LP.State状态取至IsLoaded
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10 months ago |
|
chenkui
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665c6d15f7
增加了Loadport AccessModel和State
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10 months ago |
|
chenkui
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9332919378
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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10 months ago |
