Commit History

Author SHA1 Message Date
  lixiang 38b40b702d 1.修复all in all out 不做cooling bug 7 months ago
  lixiang 1931fc55d3 1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息 7 months ago
  zhouhr 82d289e21c 1. add the function of WTWClean by WTWInterval 8 months ago
  zhouhr b8540e3e4c 1. fix the bug in VenusRecipeSequenceSelectView 8 months ago
  zhouhr dba64f7240 1. add the driver of SunWayVPA && the item in config/setmentity 8 months ago
  zhouhr 79d5e939e3 1. show the choice of AutoUnLoad 8 months ago
  zhouhr 9e1a79673e 1. add the item of AutoUnLoad for Job 8 months ago
  lixiang b113f691ee 添加Carrier ID 8 months ago
  lixiang add331513f 1.WaferHistory与ProcessHistory 添加 Carrier ID,Process History 切recipe 保留原查询信息 8 months ago
  zhouhr ff6df5295a add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType. 8 months ago
  zhouhr 149c7ce2e9 add AutoPump before StartJob && AutoUnLoad after JobDone && VCELoad Without PumpDown 8 months ago
  zhouhr b6ab013e1b fix some miss function in SE/DE Recipe && Improve VenusDispatcher 8 months ago
  zhouhr 4666252058 补充recipe界面不显示heliumpump的问题 8 months ago
  zhouhr fd27ba4304 handle some bug. 8 months ago
  zhouhr b6309f712c upload for Venus SE/DE 8 months ago
  lixiang 10c22069fe 1.添加EFEM光栅报警开关 8 months ago
  lixiang a38cb6d743 1.Revtech Match 通讯时间100ms改为300ms 9 months ago
  lixiang 7556c43a4c 1.Gas漏气检测结束ui界面不更新bug修复 9 months ago
  chenkui 9ffd49dd2d update pp-select object[] to string[] bug 9 months ago
  sangwq bcb1461e22 Routing bug while single PM and double arm running. 9 months ago
  sangwq 3a49881f33 fix the typing error. 9 months ago
  sangwq 81e78398e6 enhance the routing algorithm avoid blocking issue while single arm and single PM run. 10 months ago
  sangwq e12c5e5a93 fixed the blocking bug while return wafers. 10 months ago
  chenkui 4edd963b4b update S2F13 ECID 10 months ago
  sangwq d449c55208 Force Loadlock cooling while return wafer. 10 months ago
  lixiang ca702b093b 1.alarm List 收集到300+条,并添加到程序里 10 months ago
  chenkui e874919d1b update ECID 10 months ago
  chenkui 9c5f7f760b 修复LP.State状态取至IsLoaded 10 months ago
  chenkui 665c6d15f7 增加了Loadport AccessModel和State 10 months ago
  chenkui 9332919378 Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus 10 months ago