 sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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1 year ago |
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sangwq
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8f9b95ae8f
Develop transfer cycle.
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1 year ago |
 lixiang
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1a9114214b
robot place 删除测试代码
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1 year ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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1 year ago |
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lixiang
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072e5d0d01
ui Module TM 名变TMRobot
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1 year ago |
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sangwq
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8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
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1 year ago |
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sangwq
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2663cfc1d9
Add place/pick delay.
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1 year ago |
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sangwq
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ed992dd631
Enhance the Log Info
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1 year ago |
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sangwq
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b741650da1
TM Cycle ready.
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1 year ago |
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sangwq
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44ec74603f
TM Transfer
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2 years ago |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
