 sangwq
|
9d0da84ad2
added cooling safety check.
|
1 year ago |
 lixiang
|
465f0690e7
Cooling功能bug修复
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
lixiang
|
9163903164
Kepler2200优化
|
1 year ago |
|
sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 year ago |
|
sangwq
|
2de3872723
duplicated wafer function.
|
1 year ago |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 year ago |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
|
1 year ago |
|
sangwq
|
61173b6866
Added Auto Vent/Pump log for tracing trigger issue.
|
2 years ago |
|
sangwq
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
2 years ago |
|
sangwq
|
75314148f5
Added Auto Pump/vent option.
|
2 years ago |
|
sangwq
|
2694bdc96c
Enhance the Pre-rotation function
|
2 years ago |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
2 years ago |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 years ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
|
lixiang
|
072e5d0d01
ui Module TM 名变TMRobot
|
2 years ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
2 years ago |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
