 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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4 months ago |
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lixiang
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2cdc13a01b
1.Venus与Kepler 代码分开
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6 months ago |
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lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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7 months ago |
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lixiang
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1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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7 months ago |
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lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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8 months ago |
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lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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9 months ago |
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lixiang
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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9 months ago |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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10 months ago |
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lixiang
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e29f6e8e46
1.优化UI界面性能
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10 months ago |
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lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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10 months ago |
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lixiang
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b67769ec2c
ui优化
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11 months ago |
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lixiang
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65d80057c2
ui优化
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11 months ago |
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lixiang
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99d939492e
1.加登出界面
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11 months ago |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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1 year ago |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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1 year ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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feed6f1c8e
修复手动流气bug
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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08ec6feef2
1.优化数据分析界面颜色选择bug
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
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1 year ago |
