 lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
 Intern01
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cd8d139b3e
1.添加PrecessHistory界面与读取process_data表批次信息对应数据值信息线性图展示功能
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2 years ago |
|
lixiang
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e9951fa64d
1.添加efem/sequence等界面
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2 years ago |
|
lixiang
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ec1eeba67c
添加数据分析界面
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2 years ago |
|
lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
|
lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
 sangwq
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0443cfe386
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
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sangwq
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39dd3fa41f
Enable Com debug log.
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2 years ago |
|
lixiang
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 years ago |
|
sangwq
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2663cfc1d9
Add place/pick delay.
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2 years ago |
|
sangwq
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9d44ff32a7
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
|
sangwq
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ed992dd631
Enhance the Log Info
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2 years ago |
|
lixiang
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54ce578158
添加新版本recipe edit界面
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2 years ago |
|
sangwq
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b741650da1
TM Cycle ready.
|
2 years ago |
|
lixiang
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24fac8d71d
recipe edit新界面制作
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2 years ago |
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sangwq
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dff905345f
增加PMB的兼容
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2 years ago |
|
lixiang
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
|
sangwq
|
652afa77f9
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
66557b65bb
TMCycle not finished.
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
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2 years ago |
|
sangwq
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44ec74603f
TM Transfer
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2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
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2 years ago |
|
sangwq
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a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
lixiang
|
7299abbcd2
1.优化TM界面
|
2 years ago |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 years ago |
|
lixiang
|
62f1a16025
1.添加PartialPressure界面
|
2 years ago |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
lixiang
|
e867b47d0c
1.添加VAT VATPerformance和PartialPressure界面及数据对比图标
|
2 years ago |
