 hecl
|
f9b485c583
1.change pressurecontrol before opendoor from ChamberPressure to ProcessPressure
|
10 ヶ月 前 |
 zhouhr
|
253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
|
10 ヶ月 前 |
|
hecl
|
1a56dd552c
fix bugs
|
10 ヶ月 前 |
|
hecl
|
e2836bfbda
1.Chamber DE process enhance
|
10 ヶ月 前 |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
|
11 ヶ月 前 |
|
hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 ヶ月 前 |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
11 ヶ月 前 |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
11 ヶ月 前 |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 年間 前 |
|
hecl
|
d15749f5b1
1.fix VenusSE show chiler temp bugs
|
1 年間 前 |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 年間 前 |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 年間 前 |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 年間 前 |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
1 年間 前 |
|
zhouhr
|
8436daeb68
Eliminate SE generation warning.
|
1 年間 前 |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 年間 前 |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
1 年間 前 |
