 sangwq
|
6a29fad5f9
update for unload/PMleakcheck bugs
|
2 years ago |
|
sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
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sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
 lixiang
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f9a02a739a
添加pmc/kepler2200
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2 years ago |
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sangwq
|
3ee9634ad3
developing routing algorithm.
|
2 years ago |
|
sangwq
|
9f239420d8
improve the efem code.
|
2 years ago |
|
lixiang
|
85fc03f838
1.添加部分OpertionOverView ui功能
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2 years ago |
|
sangwq
|
60d1bca02a
update cycle module, not finished.
|
2 years ago |
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sangwq
|
e8f7e93461
EPD
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2 years ago |
|
sangwq
|
e64484a52f
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
|
lixiang
|
530ddcbae7
优化topview界面
|
2 years ago |
|
sangwq
|
c9282deeeb
EFEM Driver and simulator functions.
|
2 years ago |
|
lixiang
|
3be4fea304
优化传片动画
|
2 years ago |
|
lixiang
|
9231cab4b9
1.修改topView ui
|
2 years ago |
|
sangwq
|
f211c4242f
Efem module raw design.
|
2 years ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
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sangwq
|
39dd3fa41f
Enable Com debug log.
|
2 years ago |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
2 years ago |
|
sangwq
|
dff905345f
增加PMB的兼容
|
2 years ago |
|
sangwq
|
66557b65bb
TMCycle not finished.
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
lixiang
|
ccb4444fa8
添加部分ui按钮控制rt功能
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
53e362a33e
update
|
3 years ago |
