 sangwq
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9ba5d70aff
fix abort manual transfer bug.
|
2 years ago |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
2 years ago |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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2 years ago |
|
sangwq
|
8d21b41b42
AutoCycle enhancement.
|
2 years ago |
 lixiang
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5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
2 years ago |
|
lixiang
|
afb706578a
添加CycleCount/WaferCount显示
|
2 years ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
2 years ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 years ago |
|
sangwq
|
6a29fad5f9
update for unload/PMleakcheck bugs
|
2 years ago |
|
sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
|
sangwq
|
3ee9634ad3
developing routing algorithm.
|
2 years ago |
|
sangwq
|
60d1bca02a
update cycle module, not finished.
|
2 years ago |
|
sangwq
|
68c484e4c3
兼容去胶机使用的Endpoint.
|
2 years ago |
|
sangwq
|
d900c241bd
开发 AutoCycle 模块， 进行中
|
2 years ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
2 years ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
