 lixiang
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
 sangwq
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b71003a42d
Fix the increasing aligner angle out of range bug.
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1 year ago |
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sangwq
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c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 year ago |
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sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 year ago |
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sangwq
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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0a0308458e
Enable drag wafer while module offline.
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2 years ago |
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sangwq
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6ffcff679e
Enhance throughput.
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2 years ago |
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sangwq
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3e445737a6
Align functions.
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2 years ago |
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sangwq
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501997ac38
TM/EFEM robot single arm option.
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2 years ago |
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sangwq
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a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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2 years ago |
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lixiang
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e0817cb012
现场bug修改
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2 years ago |
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sangwq
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587a0094b4
fix logic error.
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2 years ago |
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sangwq
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2b6f4986f3
fix Efemrobot scheduler bug.
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2 years ago |
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sangwq
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8d21b41b42
AutoCycle enhancement.
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2 years ago |
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lixiang
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5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
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sangwq
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f216c69fcf
Enhance AutoCycle Module.
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2 years ago |
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sangwq
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c223835b1e
enhance AutoCycle module.
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2 years ago |
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sangwq
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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sangwq
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3ee9634ad3
developing routing algorithm.
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2 years ago |
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sangwq
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d900c241bd
开发 AutoCycle 模块， 进行中
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
