 sangwq
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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11 months ago |
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sangwq
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fe230ec531
Enhance throughput.
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11 months ago |
 lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
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11 months ago |
 hecl
|
f501000473
1.Fix Tru RF/match bugs
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11 months ago |
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sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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11 months ago |
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sangwq
|
991036681f
enhance the duplicated wafer functions.
|
1 year ago |
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sangwq
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36473578f9
Fixed the duplicated wafer bug.
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
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1 year ago |
 zhouhr
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41c5b8a615
Remove the toleranceChecker in SMCChiler && SMCShareChiller
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1 year ago |
|
zhouhr
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93fd866dbe
update SMCChillerDrive && SMCShareChiller
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1 year ago |
|
zhouhr
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 year ago |
|
lixiang
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52e8bd8f7a
1.优化Home断开重连
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1 year ago |
|
hecl
|
0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
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1 year ago |
|
hecl
|
6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
|
1 year ago |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 year ago |
|
sangwq
|
2826cd9348
Enhance the duplicated wafer function.
|
1 year ago |
|
sangwq
|
2de3872723
duplicated wafer function.
|
1 year ago |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 year ago |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
|
1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
zhouhr
|
ea68c5c25d
add clean for Venus SE.
|
1 year ago |
|
lixiang
|
166a9ab00e
VenusSE UI 打不开bug，配置文件确实Name
|
1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
|
sangwq
|
e8ae7ee302
fix the Loadlock path bug while fixed slot mode.
|
1 year ago |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 year ago |
|
sangwq
|
408e8f0786
enhance the throughput while loadlock is fixed slot pattern.
|
1 year ago |
|
sangwq
|
89d1b63b12
fix the bug which missing calling RouteTo on Vac side.
|
1 year ago |
