 hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
1 year ago |
 zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
1 year ago |
|
zhouhr
|
cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
|
1 year ago |
 lixiang
|
88fb4d096c
添加界面登出功能
|
1 year ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
1 year ago |
 sangwq
|
cc43a1d632
enhance the EFEM driver.
|
1 year ago |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
|
1 year ago |
|
sangwq
|
337c20b54d
compatible with Venus.
|
1 year ago |
|
sangwq
|
7862a9be38
solve the sync problem while set signal tower light.
|
1 year ago |
|
lixiang
|
75dbbd4da8
添加KeplerSignaltower功能
|
1 year ago |
|
hecl
|
3bf4e310a3
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 year ago |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
1 year ago |
|
sangwq
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
1 year ago |
|
sangwq
|
fe230ec531
Enhance throughput.
|
1 year ago |
|
lixiang
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
1 year ago |
|
hecl
|
f501000473
1.Fix Tru RF/match bugs
|
1 year ago |
|
sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 year ago |
|
sangwq
|
991036681f
enhance the duplicated wafer functions.
|
1 year ago |
|
sangwq
|
36473578f9
Fixed the duplicated wafer bug.
|
1 year ago |
|
lixiang
|
caba8d94c6
Duplicated Wafer UI显示
|
1 year ago |
|
zhouhr
|
41c5b8a615
Remove the toleranceChecker in SMCChiler && SMCShareChiller
|
1 year ago |
|
zhouhr
|
93fd866dbe
update SMCChillerDrive && SMCShareChiller
|
1 year ago |
|
zhouhr
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
|
1 year ago |
|
lixiang
|
52e8bd8f7a
1.优化Home断开重连
|
1 year ago |
|
hecl
|
0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
|
1 year ago |
|
hecl
|
6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
|
1 year ago |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 year ago |
|
sangwq
|
2826cd9348
Enhance the duplicated wafer function.
|
1 year ago |
|
sangwq
|
2de3872723
duplicated wafer function.
|
1 year ago |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
1 year ago |
