 hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
 lixiang
|
d35b997884
1.优化RevtechMatch状态机
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1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
hecl
|
49401d4b6e
1.Fix busgs
|
1 year ago |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
lixiang
|
038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
|
1 year ago |
|
lixiang
|
f8c50b602a
修复Tolerance对流气不开阀的bug
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
|
2 years ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
2 years ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
|
2 years ago |
|
lixiang
|
7419cea99a
添加TMCycle动画（部分）
|
2 years ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
2 years ago |
|
lixiang
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
|
lixiang
|
a268651d10
1.添加configview和部分mfcverificationview
|
2 years ago |
