 lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
|
lixiang
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08ec6feef2
1.优化数据分析界面颜色选择bug
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
 hecl
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8e5ec35137
Add tansfer checkpage add fix bug about show step
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2 years ago |
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lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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2 years ago |
 Intern01
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4d950d1f31
Fix some bugs about PM process data
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2 years ago |
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lixiang
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b1e6a9ce63
bug提交
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2 years ago |
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Intern01
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9c618d6866
DataHistory&&ProcessDataHistory update
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2 years ago |
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lixiang
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8f80478982
1.添加IoSwitch
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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e9951fa64d
1.添加efem/sequence等界面
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2 years ago |
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lixiang
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ec1eeba67c
添加数据分析界面
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2 years ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
