 zhouhr
|
149c7ce2e9
add AutoPump before StartJob && AutoUnLoad after JobDone && VCELoad Without PumpDown
|
8 months ago |
|
zhouhr
|
b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
|
8 months ago |
|
zhouhr
|
4666252058
补充recipe界面不显示heliumpump的问题
|
8 months ago |
|
zhouhr
|
fd27ba4304
handle some bug.
|
8 months ago |
|
zhouhr
|
b6309f712c
upload for Venus SE/DE
|
8 months ago |
 lixiang
|
10c22069fe
1.添加EFEM光栅报警开关
|
9 months ago |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
9 months ago |
|
lixiang
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
10 months ago |
 chenkui
|
9ffd49dd2d
update pp-select object[] to string[] bug
|
10 months ago |
 sangwq
|
bcb1461e22
Routing bug while single PM and double arm running.
|
10 months ago |
|
sangwq
|
3a49881f33
fix the typing error.
|
10 months ago |
|
sangwq
|
81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
|
10 months ago |
|
sangwq
|
e12c5e5a93
fixed the blocking bug while return wafers.
|
10 months ago |
|
chenkui
|
4edd963b4b
update S2F13 ECID
|
10 months ago |
|
sangwq
|
d449c55208
Force Loadlock cooling while return wafer.
|
10 months ago |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
10 months ago |
|
chenkui
|
e874919d1b
update ECID
|
10 months ago |
|
chenkui
|
9c5f7f760b
修复LP.State状态取至IsLoaded
|
10 months ago |
|
chenkui
|
665c6d15f7
增加了Loadport AccessModel和State
|
10 months ago |
|
chenkui
|
9332919378
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
|
10 months ago |
|
lixiang
|
8e660cd7a8
1.去除carrierid ;字符
|
10 months ago |
|
chenkui
|
b7e39609e8
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
|
10 months ago |
|
chenkui
|
9e1392f800
update eap dll
|
10 months ago |
|
lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
10 months ago |
|
lixiang
|
a9d8e56970
1.扩展alarm list
|
10 months ago |
|
chenkui
|
f93181401a
upload kelper warning id
|
10 months ago |
|
chenkui
|
c7f9243ef5
add S1F11,S1F15,S1F17 and S2F29 command & add client connection log
|
10 months ago |
|
sangwq
|
a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
|
11 months ago |
|
lixiang
|
3dd6dc62ed
修复OperationView PM显示错误bug
|
11 months ago |
|
sangwq
|
a5826caf14
Pre/Post Lot Clean functionality.
|
11 months ago |
