 sangwq
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5687e44ebc
Enhance routing algorithm.
|
1 year ago |
 lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
sangwq
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
1 year ago |
|
sangwq
|
4f7a01400f
fix the sync issue for efem socket.
|
1 year ago |
|
sangwq
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
1 year ago |
|
sangwq
|
991036681f
enhance the duplicated wafer functions.
|
1 year ago |
|
sangwq
|
52349cad2b
Duplicated wafer functions.
|
1 year ago |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
1 year ago |
|
sangwq
|
88b91b4ea3
fix routing bugs.
|
1 year ago |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
|
1 year ago |
|
sangwq
|
61173b6866
Added Auto Vent/Pump log for tracing trigger issue.
|
1 year ago |
|
sangwq
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
1 year ago |
|
sangwq
|
75314148f5
Added Auto Pump/vent option.
|
1 year ago |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
|
sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
1 year ago |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
1 year ago |
|
sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
1 year ago |
|
sangwq
|
5fc13b3f0c
New Efem design
|
2 years ago |
