 zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 kuukautta sitten |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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10 kuukautta sitten |
 hecl
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1a56dd552c
fix bugs
|
11 kuukautta sitten |
|
hecl
|
e2836bfbda
1.Chamber DE process enhance
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11 kuukautta sitten |
|
zhouhr
|
3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
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11 kuukautta sitten |
 sangwq
|
7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 kuukautta sitten |
|
sangwq
|
2edb43d393
fix the crash issue.
|
11 kuukautta sitten |
|
sangwq
|
bcbd783654
avoid crash issue for temporary fix.
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11 kuukautta sitten |
 lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 kuukautta sitten |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 vuosi sitten |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 vuosi sitten |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 vuosi sitten |
|
lixiang
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 vuosi sitten |
|
sangwq
|
6d393bb86d
new routing algorithm with prediction.
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1 vuosi sitten |
 chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
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1 vuosi sitten |
|
chenkui
|
5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 vuosi sitten |
|
chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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1 vuosi sitten |
|
sangwq
|
20606c1ffb
check in new routing algorithm code.
|
1 vuosi sitten |
|
sangwq
|
12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
|
1 vuosi sitten |
|
chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
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1 vuosi sitten |
|
sangwq
|
dbb753dd44
Pause functionality.
|
1 vuosi sitten |
|
sangwq
|
a80b5af3fd
enhance manual return wafer algorithm.
|
1 vuosi sitten |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 vuosi sitten |
|
zhouhr
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
1 vuosi sitten |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 vuosi sitten |
|
zhouhr
|
724b0ca304
add ReturnWafer for Venus SE.
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1 vuosi sitten |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 vuosi sitten |
|
sangwq
|
faa496c2b0
fix a routing bug for single PM sequence.
|
1 vuosi sitten |
|
sangwq
|
73f0d306a7
Enhance routing algorithm.
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1 vuosi sitten |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 vuosi sitten |
