 zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
il y a 10 mois |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
il y a 1 an |
 lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
il y a 1 an |
 sangwq
|
746ece5800
restore System.Name configure item
|
il y a 1 an |
|
sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
il y a 1 an |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
il y a 1 an |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
il y a 1 an |
 chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
il y a 1 an |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
|
il y a 1 an |
 hecl
|
d331213da1
1.SETM Pressure Control update
|
il y a 1 an |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
|
il y a 1 an |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
il y a 1 an |
|
hecl
|
4c8cdc5b4a
1.Update Venus SE IO
|
il y a 1 an |
|
hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
il y a 1 an |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
il y a 1 an |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
il y a 1 an |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
il y a 1 an |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
il y a 1 an |
|
lixiang
|
d744d950e1
配置文件添加Ethercat开关功能
|
il y a 1 an |
|
lixiang
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
il y a 1 an |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
il y a 1 an |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
|
zhouhr
|
8436daeb68
Eliminate SE generation warning.
|
il y a 1 an |
|
sangwq
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
|
il y a 1 an |
|
lixiang
|
08e85396fc
1.添加eventview分页功能
|
il y a 1 an |
|
lixiang
|
5e8bf0ff14
1.重绘window窗体
|
il y a 1 an |
|
lixiang
|
038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
|
il y a 1 an |
|
lixiang
|
5c995238da
1.修复kepler流气模拟器bug
|
il y a 1 an |
|
chenkui
|
44fc6989ef
1、Remove FabConnect dll file;
|
il y a 1 an |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
il y a 1 an |
