 hecl
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 rok temu |
 lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 rok temu |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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2 lat temu |
|
lixiang
|
c457973fa2
1.添加Revtech Match
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2 lat temu |
 sangwq
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03063bae6a
Enhance the routine framework.
|
2 lat temu |
|
lixiang
|
b5616b7378
解决冲突，合并代码
|
2 lat temu |
|
sangwq
|
6a29fad5f9
update for unload/PMleakcheck bugs
|
2 lat temu |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
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2 lat temu |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 lat temu |
|
lixiang
|
2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 lat temu |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 lat temu |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 lat temu |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 lat temu |
