 hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
 lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
1 year ago |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
|
1 year ago |
|
hecl
|
8b0b067448
Add chamber ISO valve status
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 year ago |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
|
1 year ago |
|
lixiang
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
lixiang
|
020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
|
1 year ago |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
|
1 year ago |
|
lixiang
|
967f6b6b9c
添加控压结束，保持一秒流气功能
|
1 year ago |
|
lixiang
|
f8c50b602a
修复Tolerance对流气不开阀的bug
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
