 zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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11 maanden geleden |
 hecl
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1a56dd552c
fix bugs
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11 maanden geleden |
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hecl
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e2836bfbda
1.Chamber DE process enhance
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11 maanden geleden |
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zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 maanden geleden |
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hecl
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0f361d7301
1.Fix SETM robot ArmExtend bugs
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1 jaar geleden |
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hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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1 jaar geleden |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 jaar geleden |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 jaar geleden |
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hecl
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 jaar geleden |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 jaar geleden |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 jaar geleden |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 jaar geleden |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 jaar geleden |
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zhouhr
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8436daeb68
Eliminate SE generation warning.
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1 jaar geleden |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 jaar geleden |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 jaar geleden |
