修改alignroutine

Venus/Venus_RT/Modules/EFEM/EFEMAlignRoutine.cs

@@ -105,7 +105,7 @@ namespace Venus_RT.Modules.EFEM
 
         private bool WaitEFEMIdle()
         {
-            return true;
+            return _efem.Status == RState.End;
         }
 
         public void Abort()