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@@ -12,9 +12,9 @@
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<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
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<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
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<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
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<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
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<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
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- <config default="100" name="PMLLMaxPressureDifference" nameView="Max PM/LL Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
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- <config default="100" name="TMLLMaxPressureDifference" nameView="Max TM/LL Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
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- <config default="100" name="PMTMMaxPressureDifference" nameView="Max PM/TM Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="15" name="PMLLMaxPressureDifference" nameView="Max PM/LL Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="15" name="TMLLMaxPressureDifference" nameView="Max TM/LL Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="15" name="PMTMMaxPressureDifference" nameView="Max PM/TM Pressure difference for open slit valve" description="" max="70" min="3" paramter="" tag="" unit="Pa" type="Double" />
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<config default="LLA,PMA,EfemRobot" name="InstalledModules" description="安装的模块" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="LLA,PMA,EfemRobot" name="InstalledModules" description="安装的模块" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
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<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
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<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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@@ -308,7 +308,7 @@
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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- <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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@@ -623,8 +623,8 @@
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="750" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="600" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="100" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="80" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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@@ -681,7 +681,7 @@
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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- <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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@@ -997,8 +997,8 @@
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="750" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="600" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="100" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="80" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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@@ -1054,7 +1054,7 @@
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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- <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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@@ -1370,8 +1370,8 @@
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="750" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="600" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="100" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="80" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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@@ -1427,7 +1427,7 @@
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
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- <config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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+ <config default="104000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="140000" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="14" min="0" paramter="" tag="" unit="Pa" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
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@@ -1743,8 +1743,8 @@
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<configs name="PendulumValve" nameView="Pendulum Valve">
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="13000" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="750" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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- <config default="600" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="100" name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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+ <config default="80" name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="250" min="0" paramter="" tag="" unit="Pa" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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