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@@ -187,7 +187,7 @@ namespace Venus_RT.Modules.PMs
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List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
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if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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{
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- toleranceObjects.Add(new ToleranceObject("RF", ProcessUnit.RFPower, ProcessUnit.RFPowerWarningRange, ProcessUnit.RFPowerAlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("RF", ProcessUnit.RFPower, ProcessUnit.RFPowerWarningRange, ProcessUnit.RFPowerAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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_RFToleranceChecker.Start(toleranceObjects);
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}
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@@ -541,14 +541,14 @@ namespace Venus_RT.Modules.PMs
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if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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{
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- toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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}
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if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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@@ -649,12 +649,12 @@ namespace Venus_RT.Modules.PMs
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if (ProcessUnit.ToleranceMode != ToleranceMode.None)
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{
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- toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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- toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime_ms, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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+ toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
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}
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@@ -786,7 +786,7 @@ namespace Venus_RT.Modules.PMs
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private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step)
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{
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var ProcessUnit = unit as ESCHVUnit;
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- if (Chamber.BackSideHeOutOfRange && step.ElapsedTime() > ProcessUnit.CheckDelay_ms)
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+ if (Chamber.BackSideHeOutOfRange && step.ElapsedTime() > ProcessUnit.CheckDelay)
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{
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LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range.");
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return RState.Failed;
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