SimulatorSystem.cs 99 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using Venus_Simulator.Devices;
  10. using System.Threading;
  11. using Venus_Core;
  12. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  13. using System.Diagnostics.Eventing.Reader;
  14. namespace Venus_Simulator.Instances
  15. {
  16. public class SimulatorSystem : Singleton<SimulatorSystem>
  17. {
  18. private PeriodicJob _thread;
  19. private Random _rd = new Random();
  20. private RD_TRIG _trigATM = new RD_TRIG();
  21. private RD_TRIG _trigVAC = new RD_TRIG();
  22. private R_TRIG _trigLLExtend = new R_TRIG();
  23. private R_TRIG _trigLLRetract = new R_TRIG();
  24. private static int count = 0;
  25. private readonly float ATM_THRESHOLD = 750000;
  26. private readonly float ATM_PRESSURE = 760000;
  27. private readonly float ATM_LoadLock_PRESSURE = 760000;
  28. private readonly uint VAC_SW_PRESSURE = 9500;
  29. private readonly uint PROCESS_GAUGE = 10000;
  30. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  31. private Dictionary<ModuleName, JetChamber> jetChambers = new Dictionary<ModuleName, JetChamber>();
  32. public SimulatorSystem()
  33. {
  34. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  35. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  36. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  37. // TODO
  38. jetChambers.Add(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  39. jetChambers.Add(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  40. jetChambers.Add(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  41. jetChambers.Add(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  42. }
  43. ~SimulatorSystem()
  44. {
  45. _thread?.Stop();
  46. }
  47. public void Initialize()
  48. {
  49. SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
  50. SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
  51. SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
  52. SetDefaultValue(ModuleName.PMD, SimulatorJetChamber.CurrentPMDChamber);
  53. SetTMDefaultValue();
  54. SetSETMDefaultValue();
  55. Singleton<DataManager>.Instance.Initialize(false);
  56. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  57. }
  58. private void SetDefaultValue(ModuleName mod, JetChamber jetChamber)
  59. {
  60. switch (jetChamber)
  61. {
  62. case JetChamber.Venus:
  63. IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
  64. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  65. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
  66. IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
  67. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  68. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  69. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  70. IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  71. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  72. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  73. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  74. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  75. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  76. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  77. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
  78. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  79. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  80. IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
  81. IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
  82. IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
  83. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  84. IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
  85. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  86. IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  87. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  88. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  89. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  90. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  91. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  92. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  93. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  94. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  95. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  96. IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
  97. IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
  98. IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
  99. IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
  100. IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
  101. IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
  102. IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
  103. IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
  104. IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
  105. IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
  106. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  107. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
  108. IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
  109. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  110. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  111. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  112. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  113. IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
  114. IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
  115. IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
  116. //// pressure
  117. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
  118. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  119. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  120. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  121. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  122. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  123. SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
  124. //// Temperature
  125. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  126. SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  127. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  128. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  129. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  130. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  131. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  132. //if (mod == ModuleName.PMA)
  133. //{
  134. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  135. //}
  136. //else if (mod == ModuleName.PMB)
  137. //{
  138. // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  139. //}
  140. // Datetime
  141. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  142. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  143. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  144. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  145. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  146. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  147. break;
  148. case JetChamber.VenusSE:
  149. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  150. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  151. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = false;
  152. IO.DI[$"{mod}.DI_ESC_Coolant_Flow_SW"].Value = true;
  153. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  154. IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
  155. IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
  156. //IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
  157. //IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  158. IO.DI[$"{mod}.DI_RF_HV_Interlock_OK"].Value = true;
  159. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = false;
  160. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = false;
  161. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  162. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  163. IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
  164. IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
  165. IO.DI[$"{mod}.DI_Foreline_Pressure_10t_Gauge_Alarm"].Value = false;
  166. IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
  167. IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
  168. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  169. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  170. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = true;
  171. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = true;
  172. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = true;
  173. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = true;
  174. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = true;
  175. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  176. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  177. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  178. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  179. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  180. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  181. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  182. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  183. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  184. IO.DI[$"{mod}.DI_MFC9_Pressure_Switch"].Value = true;
  185. IO.DI[$"{mod}.DI_MFC10_Pressure_Switch"].Value = true;
  186. IO.DI[$"{mod}.DI_MFC11_Pressure_Switch"].Value = true;
  187. IO.DI[$"{mod}.DI_MFC12_Pressure_Switch"].Value = true;
  188. IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
  189. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = true;
  190. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  191. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  192. IO.DI[$"{mod}.DI_Turbo_Pump_Water_Flow_Switch"].Value = true;
  193. IO.DI[$"{mod}.DI_SOURCE_RF_Water_Flow_Switch"].Value = true;
  194. IO.DI[$"{mod}.DI_TM_ROB_NOT_EXTEND_TO_PM"].Value = true;
  195. IO.DI[$"{mod}.DI_TM_Slit_Door_Closed"].Value = true;
  196. IO.DI[$"{mod}.DI_Source_Match_interlock_ok"].Value = true;
  197. IO.DI[$"{mod}.DI_Bias_Match_interlock_ok"].Value = true;
  198. IO.DI[$"{mod}.DI_GASLINE_TC_Deviation_out_of_range"].Value = true;
  199. IO.DI[$"{mod}.DI_GASLINE_Control_TC_Broken_Alarm"].Value = true;
  200. IO.DI[$"{mod}.DI_GASLINE_Monitor_TC_Broken_Alarm"].Value = true;
  201. IO.DI[$"{mod}.DI_GASLINE_Heater_On_FB"].Value = true;
  202. IO.DI[$"{mod}.DI_CTRL_BOX_1#FAN_OK"].Value = true;
  203. IO.DI[$"{mod}.DI_CTRL_BOX_2#FAN_OK"].Value = true;
  204. IO.DI[$"{mod}.DI_POWER_BOX_FAN_OK"].Value = true;
  205. //// pressure
  206. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  207. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  208. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  209. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  210. //// Temperature
  211. SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
  212. //SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
  213. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
  214. //SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
  215. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  216. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  217. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  218. // Datetime
  219. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  220. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  221. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  222. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  223. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  224. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  225. break;
  226. case JetChamber.Kepler2300:
  227. // chamber
  228. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  229. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  230. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  231. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  232. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
  233. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
  234. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  235. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  236. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  237. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  238. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  239. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  240. IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
  241. IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
  242. IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
  243. IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
  244. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  245. IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
  246. IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
  247. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
  248. IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
  249. IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
  250. IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
  251. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
  252. IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
  253. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  254. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  255. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  256. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  257. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  258. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  259. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  260. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  261. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  262. IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
  263. IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
  264. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  265. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  266. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  267. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  268. IO.DI[$"{mod}.DI_Foreline_OT_Switch_Alarm"].Value = false;
  269. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  270. IO.DI[$"{mod}.DI_EFEM_Door_Colse"].Value = true;
  271. IO.DI[$"{mod}.DI_ESC_Inner_Coolant_Flow_SW"].Value = true;
  272. IO.DI[$"{mod}.DI_ESC_Outer_Coolant_Flow_SW"].Value = true;
  273. //// pressure
  274. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  275. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  276. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  277. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
  278. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  279. //// Temperature
  280. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  281. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  282. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  283. SetAiValue($"{mod}.AI_ESC_inner_coolant_outlet_TC_Temp", 20);
  284. SetAiValue($"{mod}.AI_ESC_outer_coolant_outlet_TC_Temp", 30);
  285. SetAiValue($"{mod}.AI_Top_Plate_coolant_outlet_TC_Temp", 40);
  286. // Datetime
  287. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  288. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  289. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  290. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  291. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  292. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  293. break;
  294. case JetChamber.Kepler2200A:
  295. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  296. IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
  297. IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
  298. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  299. IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
  300. IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
  301. IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
  302. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  303. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  304. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  305. IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
  306. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
  307. IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
  308. IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
  309. IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
  310. IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
  311. IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
  312. IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
  313. IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
  314. IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
  315. IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
  316. IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
  317. IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
  318. IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
  319. IO.DI[$"{mod}.DI_Lid_Up_Limit_Pos_SW"].Value = true;
  320. IO.DI[$"{mod}.DI_S_Valve_OT_Switch_Alarm"].Value = false;
  321. IO.DI[$"{mod}.DI_Lid_Down_Limit_Pos_SW"].Value = true;
  322. IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
  323. IO.DI[$"{mod}.DI_TM_Safety_Door_Colse"].Value = true;
  324. IO.DI[$"{mod}.DI_Arm_Not_Extend_to_PM"].Value = true;
  325. IO.DI[$"{mod}.DI_Source_RF_Water_Flow_Switch"].Value = true;
  326. //// pressure
  327. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
  328. //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
  329. SetAiValue($"{mod}.AI_Process_Pressure_100mt", 100);
  330. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  331. //// Temperature
  332. SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
  333. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
  334. // Datetime
  335. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  336. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  337. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  338. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  339. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  340. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  341. break;
  342. }
  343. }
  344. private void SetTMDefaultValue()
  345. {
  346. ModuleName mod = ModuleName.TM;
  347. IO.DI[$"{mod}.DI_TM_Power_On"].Value = true;
  348. IO.DI[$"{mod}.DI_TM_In_Safety"].Value = true;
  349. IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
  350. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMA"].Value = true;
  351. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMB"].Value = true;
  352. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMC"].Value = true;
  353. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_PMD"].Value = true;
  354. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLA"].Value = true;
  355. IO.DI[$"{mod}.DI_TM_RB_Not_Extend_LLB"].Value = true;
  356. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLA"].Value = true;
  357. IO.DI[$"{mod}.DI_EFEM_RB_Not_Extend_LLB"].Value = true;
  358. IO.DI[$"{mod}.DI_EFEM_Side_Door_Closed"].Value = true;
  359. IO.DI[$"{mod}.DI_TM_CHB_PCW_Flow_Switch"].Value = true;
  360. IO.DI[$"{mod}.DI_LLA_PCW_Flow_Switch"].Value = true;
  361. IO.DI[$"{mod}.DI_LLB_PCW_Flow_Switch"].Value = true;
  362. IO.DI[$"{mod}.DI_TM_CHB_Door_Closed"].Value = true;
  363. IO.DI[$"{mod}.DI_LLA_Lid_Door_Closed"].Value = true;
  364. IO.DI[$"{mod}.DI_LLB_Lid_Door_Closed"].Value = true;
  365. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  366. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  367. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  368. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  369. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  370. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  371. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  372. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  373. IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
  374. IO.DI[$"{mod}.DI_Vaccum_Pressure_Switch"].Value = true;
  375. IO.DI[$"{mod}.DI_N2_Pressure_Switch"].Value = true;
  376. IO.DI[$"{mod}.DI_TM_Chamber_VAC_Gauge_Alarm"].Value = true;
  377. IO.DI[$"{mod}.DI_TM_Foreline_VAC_Gauge_Alarm"].Value = true;
  378. IO.DI[$"{mod}.DI_LLA_Chamber_VAC_Gauge_Alarm"].Value = true;
  379. IO.DI[$"{mod}.DI_LLA_Foreline_VAC_Gauge_Alarm"].Value = true;
  380. IO.DI[$"{mod}.DI_LLB_Chamber_VAC_Gauge_Alarm"].Value = true;
  381. IO.DI[$"{mod}.DI_LLB_Foreline_VAC_Gauge_Alarm"].Value = true;
  382. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = true;
  383. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = true;
  384. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = true;
  385. // Datetime
  386. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  387. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  388. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  389. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  390. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  391. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  392. SetAiValue($"{mod}.AI_TM_CHB_Pressure", 760000);
  393. SetAiValue($"{mod}.AI_TM_Foreline_Pressure", 5001);
  394. SetAiValue($"{mod}.AI_LLA_CHB_Pressure", 5002);
  395. SetAiValue($"{mod}.AI_LLA_LLB_Foreline_Pressure", 5003);
  396. SetAiValue($"{mod}.AI_LLB_CHB_Pressure", 5004);
  397. }
  398. private void SetSETMDefaultValue()
  399. {
  400. ModuleName mod = ModuleName.SETM;
  401. IO.DI[$"{mod}.DI_TM_DI1"].Value = true;
  402. IO.DI[$"{mod}.DI_TM_DI2"].Value = true;
  403. IO.DI[$"{mod}.DI_TM_DI3"].Value = true;
  404. IO.DI[$"{mod}.DI_TM_DI5"].Value = true;
  405. IO.DI[$"{mod}.DI_TM_DI7"].Value = true;
  406. IO.DI[$"{mod}.DI_TM_DI8"].Value = true;
  407. IO.DI[$"{mod}.DI_TM_DI9"].Value = true;
  408. IO.DI[$"{mod}.DI_TM_DI10"].Value = true;
  409. IO.DI[$"{mod}.DI_SYS_C1"].Value = true;
  410. IO.DI[$"{mod}.DI_SYS_C2"].Value = false;
  411. IO.DI[$"{mod}.DI_SYS_C3"].Value = false;
  412. IO.DI[$"{mod}.DI_SYS_C4"].Value = false;
  413. IO.DI[$"{mod}.DI_TSYS_C5"].Value = false;
  414. IO.DI[$"{mod}.DI_TM_N2_1"].Value = true;
  415. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  416. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  417. IO.DI[$"{mod}.DI_TM_PMA_OPS"].Value = false;
  418. IO.DI[$"{mod}.DI_TM_PMA_CLS"].Value = true;
  419. IO.DI[$"{mod}.DI_TM_PMB_OPS"].Value = false;
  420. IO.DI[$"{mod}.DI_TM_PMB_CLS"].Value = true;
  421. IO.DI[$"{mod}.DI_TM_PMC_OPS"].Value = false;
  422. IO.DI[$"{mod}.DI_TM_PMC_CLS"].Value = true;
  423. IO.DI[$"{mod}.DI_TM_HE"].Value = true;
  424. IO.DI[$"{mod}.DI_VCE_RB_RET"].Value = true;
  425. IO.DI[$"{mod}.DI_PMA_RB_RET"].Value = true;
  426. IO.DI[$"{mod}.DI_PMB_RB_RET"].Value = true;
  427. IO.DI[$"{mod}.DI_PMC_RB_RET"].Value = true;
  428. SetAiValue($"{mod}.AI_MFC_Flow_Setpoint", 3000);
  429. SetAiValue($"{mod}.AI_VCE_Vacuum_Gauge", 3000);
  430. SetAiValue($"{mod}.AI_VCE_Pipeline_Vacuum_Gauge", 3000);
  431. SetAiValue($"{mod}.AI_TM_Pipeline_Vacuum_Gauge", 3000);
  432. SetAiValue($"{mod}.AI_TM_Vacuum_Gauge", 3000);
  433. }
  434. private bool OnMonitor()
  435. {
  436. try
  437. {
  438. foreach (var item in jetChambers)
  439. {
  440. switch (item.Value)
  441. {
  442. case JetChamber.Venus:
  443. MonitorSlitDoor(item.Key);
  444. MonitorPin(item.Key);
  445. MonitorPressure(item.Key);
  446. MonitorExtendAndRetract(item.Key);
  447. MonitorGas(item.Key);
  448. this.SimulateHe(item.Key);
  449. //MonitorRF(item.Key);
  450. ChangeTime(item.Key);
  451. //MonitorIOPumpCtrl(item.Key);
  452. break;
  453. case JetChamber.Kepler2300:
  454. MonitorSlitDoor(item.Key);
  455. MonitorPin(item.Key);
  456. MonitorPressure_Kepler(item.Key);
  457. //MonitorTemperature(item.Key);
  458. MonitorGas(item.Key);
  459. this.SimulateHe(item.Key);
  460. //MonitorRF(item.Key);
  461. ChangeTime(item.Key);
  462. //MonitorIOPumpCtrl(item.Key);
  463. MonitorLid(item.Key);
  464. break;
  465. case JetChamber.Kepler2200A:
  466. MonitorSlitDoor(item.Key);
  467. MonitorPressure_Kepler2200A(item.Key);
  468. //MonitorTemperature(item.Key);
  469. MonitorGas(item.Key);
  470. // MonitorRF(item.Key);
  471. ChangeTime(item.Key);
  472. //MonitorIOPumpCtrl(item.Key);
  473. MonitorLid(item.Key);
  474. MonitorIOHighTemperatureHeater(item.Key);
  475. break;
  476. case JetChamber.Kepler2200B:
  477. break;
  478. case JetChamber.VenusSE:
  479. MonitorPin(item.Key);
  480. //MonitorVenuSESlitDoor(item.Key);
  481. MonitorPressure_VenusSE(item.Key);
  482. break;
  483. }
  484. }
  485. ChangeTime(ModuleName.TM);
  486. MonitorMFSlitDoor();
  487. MonitorSEMFSlitDoor();
  488. MonitorMFPressure();
  489. MonitorSEMFPressure();
  490. }
  491. catch (Exception e)
  492. {
  493. LOG.WriteExeption(e);
  494. }
  495. return true;
  496. }
  497. private void ChangeTime(ModuleName mod)
  498. {
  499. // Heartbeat with PLC
  500. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  501. SetAiValue($"{mod}.AI_Year", DateTime.Now.Year);
  502. SetAiValue($"{mod}.AI_Month", DateTime.Now.Month);
  503. SetAiValue($"{mod}.AI_Day", DateTime.Now.Day);
  504. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  505. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  506. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  507. }
  508. //void MonitorVenuSESlitDoor(ModuleName mod)
  509. //{
  510. //}
  511. void MonitorSlitDoor(ModuleName mod)
  512. {
  513. // slit door open
  514. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  515. {
  516. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = true;
  517. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = false;
  518. }
  519. // slit door close
  520. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  521. {
  522. IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
  523. IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
  524. }
  525. }
  526. void MonitorMFSlitDoor()
  527. {
  528. ModuleName mod = ModuleName.TM;
  529. // LLA T door open
  530. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Open"].Value)
  531. {
  532. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = true;
  533. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = false;
  534. }
  535. // LLB T door open
  536. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Open"].Value)
  537. {
  538. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = true;
  539. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = false;
  540. }
  541. // LLA E door open
  542. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Open"].Value)
  543. {
  544. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = true;
  545. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = false;
  546. }
  547. // LLB E door open
  548. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Open"].Value)
  549. {
  550. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = true;
  551. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = false;
  552. }
  553. // LLA T door close
  554. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_T_Close"].Value)
  555. {
  556. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_open_Position"].Value = false;
  557. IO.DI[$"{mod}.DI_LLA_T_Slit_Door_close_Position"].Value = true;
  558. }
  559. // LLB T door close
  560. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_T_Close"].Value)
  561. {
  562. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_open_Position"].Value = false;
  563. IO.DI[$"{mod}.DI_LLB_T_Slit_Door_close_Position"].Value = true;
  564. }
  565. // LLA E door close
  566. if (IO.DO[$"{mod}.DO_LLA_Slit_Door_E_Close"].Value)
  567. {
  568. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_open_Position"].Value = false;
  569. IO.DI[$"{mod}.DI_LLA_E_Slit_Door_close_Position"].Value = true;
  570. }
  571. // LLB E door close
  572. if (IO.DO[$"{mod}.DO_LLB_Slit_Door_E_Close"].Value)
  573. {
  574. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_open_Position"].Value = false;
  575. IO.DI[$"{mod}.DI_LLB_E_Slit_Door_close_Position"].Value = true;
  576. }
  577. }
  578. void MonitorSEMFSlitDoor()
  579. {
  580. ModuleName mod = ModuleName.SETM;
  581. // VCE T door open
  582. if (IO.DO[$"{mod}.DO_VCE_TM_OP"].Value)
  583. {
  584. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = true;
  585. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = false;
  586. }
  587. // VCE T door Close
  588. if (IO.DO[$"{mod}.DO_VCE_TM_CL"].Value)
  589. {
  590. IO.DI[$"{mod}.DI_VCE_TM_OPS"].Value = false;
  591. IO.DI[$"{mod}.DI_VCE_TM_CLS"].Value = true;
  592. }
  593. }
  594. void MonitorPin(ModuleName mod)
  595. {
  596. // lift pin up
  597. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  598. {
  599. IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  600. IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  601. }
  602. }
  603. void MonitorLid(ModuleName mod)
  604. {
  605. // lift pin up
  606. if (IO.DO[$"{mod}.DO_Lid_Up"].Value != IO.DO[$"{mod}.DO_Lid_Down"].Value)
  607. {
  608. IO.DI[$"{mod}.DI_Lid_Closed"].Value = IO.DO[$"{mod}.DO_Lid_Down"].Value;
  609. }
  610. }
  611. void MonitorExtendAndRetract(ModuleName mod)
  612. {
  613. // Extend
  614. _trigLLExtend.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Extend"].Value;
  615. if (_trigLLExtend.Q)
  616. {
  617. _trigLLRetract.RST = true;
  618. Thread.Sleep(500);
  619. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = true;
  620. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = false;
  621. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  622. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  623. }
  624. // Retract
  625. _trigLLRetract.CLK = IO.DO[$"{mod}.DO_Loadlock_Arm_Retract"].Value;
  626. if (_trigLLRetract.Q)
  627. {
  628. count++;
  629. _trigLLExtend.RST = true;
  630. Thread.Sleep(500);
  631. IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
  632. IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
  633. if (count == 1)
  634. {
  635. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
  636. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  637. }
  638. else if (count == 2)
  639. {
  640. count = 0;
  641. IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = true;
  642. IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
  643. }
  644. }
  645. }
  646. void MonitorPressure(ModuleName mod)
  647. {
  648. string sAI_Foreline = "AI_Foreline_Pressure_760t";
  649. // Loadlock pressure
  650. string sAI_LoadLockPressure = "AI_LL_Pressure_760t";
  651. // Foreline
  652. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  653. {
  654. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  655. }
  656. else
  657. {
  658. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  659. }
  660. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  661. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  662. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  663. //float chamber_pressure = GetMockChamberPressure(mod);
  664. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  665. // soft pump & fast pump
  666. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  667. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  668. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  669. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  670. {
  671. //任意泵打开
  672. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  673. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  674. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  675. {//开双泵
  676. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  677. {
  678. float targetChamberPressure = getAiValue_ChamberPressure - 30000 > 0 ? getAiValue_ChamberPressure - 30000 : 0;
  679. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  680. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  681. }
  682. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  683. {
  684. float targetChamberPressure = getAiValue_ProcessPressure - 1500 > 0 ? getAiValue_ProcessPressure - 1500 : 0;
  685. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  686. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  687. }
  688. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  689. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  690. }
  691. else if (fast_pump_vlv.Value)//开
  692. {
  693. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  694. {
  695. float targetChamberPressure = getAiValue_ChamberPressure - 25000 > 0 ? getAiValue_ChamberPressure - 25000 : 0;
  696. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  697. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  698. }
  699. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  700. {
  701. float targetChamberPressure = getAiValue_ProcessPressure - 1300 > 0 ? getAiValue_ProcessPressure - 1300 : 0;
  702. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  703. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  704. }
  705. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  706. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  707. }
  708. else if (soft_pump_vlv.Value)
  709. {
  710. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  711. {
  712. float targetChamberPressure = getAiValue_ChamberPressure - 10000 > 0 ? getAiValue_ChamberPressure - 10000 : 0;
  713. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  714. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  715. }
  716. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  717. {
  718. float targetChamberPressure = getAiValue_ProcessPressure - 1100 > 0 ? getAiValue_ProcessPressure - 1100 : 0;
  719. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetChamberPressure);
  720. SetAiValue($"{mod}.{sAI_ProcessPressure}", targetChamberPressure);
  721. }
  722. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  723. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  724. }
  725. else if (turbo_pump_vlv.Value)
  726. {
  727. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  728. if ((getAiValue_ChamberPressure - 500) >= 0)
  729. SetAiValue($"{mod}.{sAI_ChamberPressure}", getAiValue_ChamberPressure - 500);
  730. else
  731. SetAiValue($"{mod}.{sAI_ChamberPressure}", 0);
  732. if ((getAiValue_ProcessPressure - 500) >= 0)
  733. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  734. else
  735. SetAiValue($"{mod}.{sAI_ProcessPressure}", 0);
  736. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  737. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  738. }
  739. }
  740. // fast vent & purge
  741. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  742. //DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  743. //if (vent_vlv.Value || purge_vlv.Value)
  744. //{
  745. // if (vent_vlv.Value && purge_vlv.Value)
  746. // {
  747. // float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  748. // float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  749. // if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  750. // {
  751. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  752. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  753. // }
  754. // else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  755. // {
  756. // getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  757. // SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  758. // SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  759. // }
  760. // //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  761. // //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  762. // }
  763. // else
  764. //
  765. if (vent_vlv.Value)
  766. {
  767. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  768. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  769. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  770. {
  771. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  772. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  773. }
  774. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  775. {
  776. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  777. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  778. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  779. }
  780. else
  781. {
  782. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  783. }
  784. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  785. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  786. }
  787. // Loadlock Pumping Valve
  788. DOAccessor Loadlock_pump_vlv = IO.DO[$"{mod}.DO_Loadlock_Pumping_Valve"];
  789. if (Loadlock_pump_vlv.Value)
  790. {
  791. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") - 30000);
  792. }
  793. // Loadlock vent
  794. DOAccessor Loadlock_vent_vlv = IO.DO[$"{mod}.DO_Loadlock_Vent_Valve"];
  795. if (Loadlock_vent_vlv.Value)
  796. {
  797. SetAiValue($"{mod}.{sAI_LoadLockPressure}", GetAiValue($"{mod}.{sAI_LoadLockPressure}") + 30000);
  798. }
  799. // 压力值越界,复位
  800. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  801. if (chamber_pressure1 > ATM_PRESSURE)
  802. {
  803. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  804. }
  805. else if (chamber_pressure1 < 20)
  806. {
  807. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  808. }
  809. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  810. if (process_pressure1 > PROCESS_GAUGE)
  811. {
  812. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  813. }
  814. else if (process_pressure1 < 20)
  815. {
  816. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  817. }
  818. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  819. if (foreline_pressure > 10000)
  820. {
  821. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 10000);
  822. }
  823. else if (foreline_pressure < 150)
  824. {
  825. SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 150);
  826. }
  827. // 模拟压力计漂移
  828. //int p1 = (int)GetMockChamberPressure(mod);
  829. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  830. //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", new_p1);
  831. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_Pressure_10t");
  832. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  833. //SetAiValue($"{mod}.AI_Foreline_Pressure_10t", new_p2);
  834. //int p3 = (int)GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  835. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  836. //SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", new_p3);
  837. // 根据当前压力值设定信号
  838. //float chamber_pressure2 = GetMockChamberPressure(mod);
  839. // ATM switch
  840. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  841. // VAC switch
  842. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  843. // Throttle valve
  844. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  845. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  846. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  847. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  848. // 压力值
  849. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  850. //{
  851. // short increase = (short)_rd.Next(20, 30);
  852. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  853. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  854. // {
  855. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  856. // }
  857. //}
  858. //else
  859. //{
  860. // short increase = (short)_rd.Next(20, 30);
  861. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  862. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  863. // {
  864. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  865. // }
  866. //}
  867. //// 位置值
  868. //if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  869. //{
  870. // short increase = (short)_rd.Next(20, 30);
  871. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  872. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  873. // {
  874. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  875. // }
  876. //}
  877. //else
  878. //{
  879. // short increase = (short)_rd.Next(20, 30);
  880. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  881. // if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  882. // {
  883. // SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  884. // }
  885. //}
  886. }
  887. void MonitorPressure_Kepler(ModuleName mod)
  888. {
  889. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  890. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  891. {
  892. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  893. }
  894. else
  895. {
  896. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  897. }
  898. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  899. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  900. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  901. //float chamber_pressure = GetMockChamberPressure(mod);
  902. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  903. // soft pump & fast pump
  904. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  905. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  906. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  907. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  908. {
  909. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  910. {
  911. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  912. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  913. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  914. {
  915. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  916. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  917. }
  918. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  919. {
  920. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  921. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  922. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  923. }
  924. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  925. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  926. }
  927. else if (fast_pump_vlv.Value)
  928. {
  929. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  930. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  931. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  932. {
  933. float targetPressure = getAiValue_ChamberPressure > 26000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000 : 20;
  934. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  935. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  936. }
  937. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  938. {
  939. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  940. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  941. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  942. }
  943. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  944. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  945. }
  946. else if (soft_pump_vlv.Value)
  947. {
  948. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  949. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  950. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  951. {
  952. float targetPressure = getAiValue_ChamberPressure > 23000 ? GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000 : 20;
  953. SetAiValue($"{mod}.{sAI_ChamberPressure}", targetPressure);
  954. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  955. }
  956. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  957. {
  958. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  959. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  960. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  961. }
  962. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  963. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  964. }
  965. else if (turbo_pump_vlv.Value)
  966. {
  967. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  968. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  969. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  970. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  971. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  972. }
  973. }
  974. // fast vent & purge
  975. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  976. if (vent_vlv.Value)
  977. {
  978. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  979. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  980. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  981. {
  982. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  983. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  984. }
  985. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  986. {
  987. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  988. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  989. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  990. }
  991. else
  992. {
  993. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  994. }
  995. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  996. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  997. }
  998. // Loadlock Pumping Valve
  999. // 压力值越界,复位
  1000. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1001. if (chamber_pressure1 > ATM_PRESSURE)
  1002. {
  1003. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1004. }
  1005. else if (chamber_pressure1 < 20)
  1006. {
  1007. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1008. }
  1009. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1010. if (process_pressure1 > PROCESS_GAUGE)
  1011. {
  1012. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1013. }
  1014. else if (process_pressure1 < 20)
  1015. {
  1016. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1017. }
  1018. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1019. if (foreline_pressure > 10000)
  1020. {
  1021. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1022. }
  1023. else if (foreline_pressure < 150)
  1024. {
  1025. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1026. }
  1027. // ATM switch
  1028. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1029. // VAC switch
  1030. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1031. }
  1032. void MonitorPressure_VenusSE(ModuleName mod)
  1033. {
  1034. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1035. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1036. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1037. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1038. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1039. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1040. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1041. {
  1042. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1043. }
  1044. else
  1045. {
  1046. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1047. }
  1048. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1049. {
  1050. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1051. {
  1052. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1053. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1054. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1055. {
  1056. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1057. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1058. }
  1059. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1060. {
  1061. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1062. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1063. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1064. }
  1065. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1066. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1067. }
  1068. else if (fast_pump_vlv.Value)
  1069. {
  1070. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1071. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1072. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1073. {
  1074. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1075. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1076. }
  1077. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1078. {
  1079. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1080. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1081. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1082. }
  1083. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1084. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1085. }
  1086. else if (soft_pump_vlv.Value)
  1087. {
  1088. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1089. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1090. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1091. {
  1092. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1093. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1094. }
  1095. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1096. {
  1097. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1098. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1099. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1100. }
  1101. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1102. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1103. }
  1104. else if (turbo_pump_vlv.Value)
  1105. {
  1106. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1107. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1108. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1109. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1110. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1111. }
  1112. }
  1113. // 压力值越界,复位
  1114. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1115. if (chamber_pressure1 > ATM_PRESSURE)
  1116. {
  1117. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1118. }
  1119. else if (chamber_pressure1 < 20)
  1120. {
  1121. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1122. }
  1123. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1124. if (process_pressure1 > PROCESS_GAUGE)
  1125. {
  1126. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1127. }
  1128. else if (process_pressure1 < 20)
  1129. {
  1130. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1131. }
  1132. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1133. if (foreline_pressure > 10000)
  1134. {
  1135. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1136. }
  1137. else if (foreline_pressure < 150)
  1138. {
  1139. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1140. }
  1141. // ATM switch
  1142. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1143. // VAC switch
  1144. IO.DI[$"{mod}.DI_PM_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1145. }
  1146. void MonitorPressure_Kepler2200A(ModuleName mod)
  1147. {
  1148. string sAI_Foreline = "AI_Foreline_Pressure_10t";
  1149. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  1150. {
  1151. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  1152. }
  1153. else
  1154. {
  1155. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  1156. }
  1157. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  1158. string sAI_ChamberPressure = "AI_Chamber_Pressure_10t";
  1159. string sAI_ProcessPressure = "AI_Chamber_Pressure_Virtual";
  1160. //float chamber_pressure = GetMockChamberPressure(mod);
  1161. //float process_pressure = GetAiValue($"{mod}.AI_Chamber_Pressure_Virtual");
  1162. // soft pump & fast pump
  1163. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  1164. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  1165. DOAccessor turbo_pump_vlv = IO.DO[$"{mod}.DO_Turbo_Pump_Pumping_Valve"];
  1166. if (fast_pump_vlv.Value || soft_pump_vlv.Value || turbo_pump_vlv.Value)
  1167. {
  1168. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  1169. {
  1170. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1171. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1172. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1173. {
  1174. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  1175. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1176. }
  1177. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1178. {
  1179. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1180. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1181. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  1182. }
  1183. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  1184. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  1185. }
  1186. else if (fast_pump_vlv.Value)
  1187. {
  1188. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1189. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1190. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1191. {
  1192. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  1193. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1194. }
  1195. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1196. {
  1197. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1198. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1199. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  1200. }
  1201. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  1202. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  1203. }
  1204. else if (soft_pump_vlv.Value)
  1205. {
  1206. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1207. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1208. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1209. {
  1210. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  1211. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1212. }
  1213. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1214. {
  1215. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1216. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1217. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  1218. }
  1219. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  1220. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  1221. }
  1222. else if (turbo_pump_vlv.Value)
  1223. {
  1224. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1225. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1226. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1227. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1228. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 500);
  1229. }
  1230. }
  1231. // fast vent & purge
  1232. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_N2_Valve"];
  1233. if (vent_vlv.Value)
  1234. {
  1235. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1236. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1237. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  1238. {
  1239. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1240. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  1241. }
  1242. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  1243. {
  1244. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  1245. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1246. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  1247. }
  1248. else
  1249. {
  1250. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  1251. }
  1252. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  1253. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  1254. }
  1255. // Loadlock Pumping Valve
  1256. // 压力值越界,复位
  1257. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  1258. if (chamber_pressure1 > ATM_PRESSURE)
  1259. {
  1260. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
  1261. }
  1262. else if (chamber_pressure1 < 20)
  1263. {
  1264. SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 20);
  1265. }
  1266. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  1267. if (process_pressure1 > PROCESS_GAUGE)
  1268. {
  1269. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
  1270. }
  1271. else if (process_pressure1 < 20)
  1272. {
  1273. SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", 20);
  1274. }
  1275. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  1276. if (foreline_pressure > 10000)
  1277. {
  1278. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 10000);
  1279. }
  1280. else if (foreline_pressure < 150)
  1281. {
  1282. SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 150);
  1283. }
  1284. // ATM switch
  1285. IO.DI[$"{mod}.DI_ATM_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  1286. // VAC switch
  1287. IO.DI[$"{mod}.DI_VAC_Switch"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  1288. }
  1289. void MonitorSEMFPressure()
  1290. {
  1291. ModuleName mod = ModuleName.SETM;
  1292. string VCE_ChamberPressure = "AI_VCE_Vacuum_Gauge";
  1293. string TM_AI_ChamberPressure = "AI_TM_Vacuum_Gauge";
  1294. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_TM_V_HS"];
  1295. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_TM_V_LS"];
  1296. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_HS"];
  1297. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_TM_B_LS"];
  1298. DOAccessor VCE_fast_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_HS"];
  1299. DOAccessor VCE_soft_pump_vlv = IO.DO[$"{mod}.DO_VCE_V_LS"];
  1300. DOAccessor VCE_fast_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_HS"];
  1301. DOAccessor VCE_soft_Vent_vlv = IO.DO[$"{mod}.DO_VCE_B_LS"];
  1302. float getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1303. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1304. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1305. {
  1306. if (getAiValue_TM_ChamberPressure > 10000)
  1307. {
  1308. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1309. }
  1310. else if (getAiValue_TM_ChamberPressure <= 10000)
  1311. {
  1312. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1313. }
  1314. }
  1315. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1316. {
  1317. if (getAiValue_TM_ChamberPressure > 10000)
  1318. {
  1319. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1320. }
  1321. else if (getAiValue_TM_ChamberPressure <= 10000)
  1322. {
  1323. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1324. }
  1325. }
  1326. if (VCE_fast_pump_vlv.Value || VCE_soft_pump_vlv.Value)
  1327. {
  1328. if (getAiValue_VCE_ChamberPressure > 10000)
  1329. {
  1330. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 30000);
  1331. }
  1332. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1333. {
  1334. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") - 1500);
  1335. }
  1336. }
  1337. if (VCE_fast_Vent_vlv.Value || VCE_soft_Vent_vlv.Value)
  1338. {
  1339. if (getAiValue_VCE_ChamberPressure > 10000)
  1340. {
  1341. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 30000);
  1342. }
  1343. else if (getAiValue_VCE_ChamberPressure <= 10000)
  1344. {
  1345. SetAiValue($"{mod}.{VCE_ChamberPressure}", GetAiValue($"{mod}.{VCE_ChamberPressure}") + 1500);
  1346. }
  1347. }
  1348. getAiValue_VCE_ChamberPressure = GetAiValue($"{mod}.{VCE_ChamberPressure}");
  1349. if (getAiValue_VCE_ChamberPressure > ATM_PRESSURE)
  1350. {
  1351. SetAiValue($"{mod}.{VCE_ChamberPressure}", ATM_PRESSURE);
  1352. }
  1353. else if (getAiValue_VCE_ChamberPressure < 20)
  1354. {
  1355. SetAiValue($"{mod}.{VCE_ChamberPressure}", 20);
  1356. }
  1357. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1358. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1359. {
  1360. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1361. }
  1362. else if (getAiValue_TM_ChamberPressure < 20)
  1363. {
  1364. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1365. }
  1366. IO.DI[$"{mod}.DI_VCE_V"].Value = GetAiValue($"{mod}.{VCE_ChamberPressure}") < VAC_SW_PRESSURE;
  1367. // VAC switch
  1368. IO.DI[$"{mod}.DI_TM_V"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1369. }
  1370. void MonitorMFPressure()
  1371. {
  1372. //if (SimulatorJetTM.CurrentTM == JetTMType.Venus)
  1373. //{
  1374. string LLA_AI_ChamberPressure = "AI_LLA_CHB_Pressure";
  1375. string LLB_AI_ChamberPressure = "AI_LLB_CHB_Pressure";
  1376. string TM_AI_ChamberPressure = "AI_TM_CHB_Pressure";
  1377. ModuleName mod = ModuleName.TM;
  1378. DOAccessor LLA_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLA"];
  1379. DOAccessor LLA_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLA"];
  1380. DOAccessor LLB_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_LLB"];
  1381. DOAccessor LLB_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_LLB"];
  1382. DOAccessor TM_fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve_TM"];
  1383. DOAccessor TM_soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve_TM"];
  1384. DOAccessor LLA_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLA"];
  1385. DOAccessor LLA_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLA"];
  1386. DOAccessor LLB_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_LLB"];
  1387. DOAccessor LLB_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_LLB"];
  1388. DOAccessor TM_fast_Vent_vlv = IO.DO[$"{mod}.DO_Vent_Valve_TM"];
  1389. DOAccessor TM_soft_Vent_vlv = IO.DO[$"{mod}.DO_Purge_Valve_TM"];
  1390. float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1391. float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1392. float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1393. if (LLA_fast_pump_vlv.Value || LLA_soft_pump_vlv.Value)
  1394. {
  1395. if (getAiValue_LLA_ChamberPressure > 10000)
  1396. {
  1397. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 30000);
  1398. }
  1399. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1400. {
  1401. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") - 1500);
  1402. }
  1403. }
  1404. if (LLB_fast_pump_vlv.Value || LLB_soft_pump_vlv.Value)
  1405. {
  1406. if (getAiValue_LLB_ChamberPressure > 10000)
  1407. {
  1408. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 30000);
  1409. }
  1410. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1411. {
  1412. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") - 1500);
  1413. }
  1414. }
  1415. if (TM_fast_pump_vlv.Value || TM_soft_pump_vlv.Value)
  1416. {
  1417. if (getAiValue_TM_ChamberPressure > 10000)
  1418. {
  1419. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 30000);
  1420. }
  1421. else if (getAiValue_TM_ChamberPressure <= 10000)
  1422. {
  1423. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") - 1500);
  1424. }
  1425. }
  1426. if (LLA_fast_Vent_vlv.Value || LLA_soft_Vent_vlv.Value)
  1427. {
  1428. if (getAiValue_LLA_ChamberPressure > 10000)
  1429. {
  1430. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 30000);
  1431. }
  1432. else if (getAiValue_LLA_ChamberPressure <= 10000)
  1433. {
  1434. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") + 1500);
  1435. }
  1436. }
  1437. if (LLB_fast_Vent_vlv.Value || LLB_soft_Vent_vlv.Value)
  1438. {
  1439. if (getAiValue_LLB_ChamberPressure > 10000)
  1440. {
  1441. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 30000);
  1442. }
  1443. else if (getAiValue_LLB_ChamberPressure <= 10000)
  1444. {
  1445. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") + 1500);
  1446. }
  1447. }
  1448. if (TM_fast_Vent_vlv.Value || TM_soft_Vent_vlv.Value)
  1449. {
  1450. if (getAiValue_TM_ChamberPressure > 10000)
  1451. {
  1452. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 30000);
  1453. }
  1454. else if (getAiValue_TM_ChamberPressure <= 10000)
  1455. {
  1456. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", GetAiValue($"{mod}.{TM_AI_ChamberPressure}") + 1500);
  1457. }
  1458. }
  1459. getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1460. if (getAiValue_LLA_ChamberPressure > ATM_PRESSURE)
  1461. {
  1462. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", ATM_PRESSURE);
  1463. }
  1464. else if (getAiValue_LLA_ChamberPressure < 20)
  1465. {
  1466. SetAiValue($"{mod}.{LLA_AI_ChamberPressure}", 20);
  1467. }
  1468. getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1469. if (getAiValue_LLB_ChamberPressure > ATM_PRESSURE)
  1470. {
  1471. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", ATM_PRESSURE);
  1472. }
  1473. else if (getAiValue_LLB_ChamberPressure < 20)
  1474. {
  1475. SetAiValue($"{mod}.{LLB_AI_ChamberPressure}", 20);
  1476. }
  1477. getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1478. if (getAiValue_TM_ChamberPressure > ATM_PRESSURE)
  1479. {
  1480. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", ATM_PRESSURE);
  1481. }
  1482. else if (getAiValue_TM_ChamberPressure < 20)
  1483. {
  1484. SetAiValue($"{mod}.{TM_AI_ChamberPressure}", 20);
  1485. }
  1486. // ATM switch
  1487. IO.DI[$"{mod}.DI_TM_ATM_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") > ATM_THRESHOLD;
  1488. // VAC switch
  1489. IO.DI[$"{mod}.DI_TM_VAC_Switch"].Value = GetAiValue($"{mod}.{TM_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1490. // ATM switch
  1491. IO.DI[$"{mod}.DI_LLA_ATM_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") > ATM_THRESHOLD;
  1492. // VAC switch
  1493. IO.DI[$"{mod}.DI_LLA_VAC_Switch"].Value = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1494. // ATM switch
  1495. IO.DI[$"{mod}.DI_LLB_ATM_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") > ATM_THRESHOLD;
  1496. // VAC switch
  1497. IO.DI[$"{mod}.DI_LLB_VAC_Switch"].Value = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}") < VAC_SW_PRESSURE;
  1498. // }
  1499. //else if (SimulatorJetTM.CurrentTM == JetTMType.VenusSE)
  1500. //{
  1501. // ModuleName mod = ModuleName.TM;
  1502. // //float getAiValue_LLA_ChamberPressure = GetAiValue($"{mod}.{LLA_AI_ChamberPressure}");
  1503. // //float getAiValue_LLB_ChamberPressure = GetAiValue($"{mod}.{LLB_AI_ChamberPressure}");
  1504. // //float getAiValue_TM_ChamberPressure = GetAiValue($"{mod}.{TM_AI_ChamberPressure}");
  1505. //}
  1506. }
  1507. void SetAiValue(string name, float value)
  1508. {
  1509. byte[] flow = BitConverter.GetBytes(value);
  1510. short high1 = BitConverter.ToInt16(flow, 0);
  1511. short low1 = BitConverter.ToInt16(flow, 2);
  1512. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  1513. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  1514. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1515. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1516. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1517. }
  1518. float GetAiValue(string name)
  1519. {
  1520. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  1521. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  1522. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1523. return flow;
  1524. }
  1525. float GetAoValue(string name)
  1526. {
  1527. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  1528. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  1529. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  1530. return flow;
  1531. }
  1532. void MonitorTemperature(ModuleName mod)
  1533. {
  1534. //IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  1535. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  1536. IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  1537. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  1538. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  1539. // 底座
  1540. //if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1541. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1542. //{
  1543. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  1544. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  1545. //}
  1546. //else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  1547. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  1548. //{
  1549. // SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  1550. // SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  1551. //}
  1552. // Foreline
  1553. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1554. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1555. {
  1556. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") + _rd.Next(1, 2));
  1557. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") + _rd.Next(1, 2));
  1558. }
  1559. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  1560. GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  1561. {
  1562. SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", GetAiValue($"{mod}.AI_Fline_Control_TC_Temp") - _rd.Next(1, 2));
  1563. SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp") - _rd.Next(1, 2));
  1564. }
  1565. // Wall
  1566. if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1567. GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1568. {
  1569. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  1570. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  1571. }
  1572. else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  1573. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  1574. {
  1575. SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  1576. SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  1577. }
  1578. }
  1579. void MonitorGas(ModuleName mod)
  1580. {
  1581. // gas
  1582. this.SimulateMFC(mod, 1);
  1583. this.SimulateMFC(mod, 2);
  1584. this.SimulateMFC(mod, 3);
  1585. this.SimulateMFC(mod, 4);
  1586. this.SimulateMFC(mod, 5);
  1587. this.SimulateMFC(mod, 6);
  1588. this.SimulateMFC(mod, 7);
  1589. this.SimulateMFC(mod, 8);
  1590. this.SimulateN2(mod);
  1591. }
  1592. private void SimulateMFC(ModuleName mod, byte gasNum)
  1593. {
  1594. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  1595. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1596. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  1597. }
  1598. private void SimulateN2(ModuleName mod)
  1599. {
  1600. var sp = GetAoValue($"{mod}.AO_Turbo_Pump_N2_Flow_Setpoint");
  1601. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1602. SetAiValue($"{mod}.AI_Turbo_Pump_N2_Flow", (float)mock_fb);
  1603. }
  1604. private void SimulateHe(ModuleName mod)
  1605. {
  1606. var sp = GetAoValue($"{mod}.AO_He_Flow_Setpoint");
  1607. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1608. SetAiValue($"{mod}.AI_ESC_He_Flow", (float)mock_fb);
  1609. }
  1610. void MonitorRF(ModuleName mod)
  1611. {
  1612. // RF generator
  1613. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  1614. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  1615. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1616. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  1617. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  1618. }
  1619. void MonitorIOPumpCtrl(ModuleName mod)
  1620. {
  1621. if (IO.DO[$"{mod}.DO_Pump_Run"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = true;
  1622. if (IO.DO[$"{mod}.DO_Pump_Stop"].Value) IO.DI[$"{mod}.DI_Dry_Pump_Running"].Value = false;
  1623. }
  1624. void MonitorIOHighTemperatureHeater(ModuleName mod)
  1625. {
  1626. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  1627. {
  1628. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  1629. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1630. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1631. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1632. }
  1633. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  1634. {
  1635. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1636. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  1637. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1638. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1639. }
  1640. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  1641. {
  1642. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1643. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1644. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  1645. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  1646. }
  1647. if (IO.DO[$"{mod}.DO_Lift_Servo_Origin"].Value)
  1648. {
  1649. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  1650. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  1651. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  1652. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  1653. }
  1654. IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_H-HT_Heater_On"].Value;
  1655. var sp = GetAoValue($"{mod}.AO_CHB_H-HT_Temperature_Setpoint");
  1656. var mock_fb = _rd.Next((int)sp - 1, (int)sp + 1) + _rd.NextDouble();
  1657. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  1658. SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", (float)mock_fb);
  1659. }
  1660. public void Terminate()
  1661. {
  1662. _thread.Stop();
  1663. }
  1664. public void SetCoolantOutletTemp(string module, int Temp)
  1665. {
  1666. //if (SimulatorJetChamber.CurrentChamber == JetChamber.Venus)
  1667. //{
  1668. //SetAiValue($"{module}.AI_Coolant_Outlet_Temp", Temp);
  1669. //}
  1670. }
  1671. }
  1672. }