VenusDevice.cs 6.1 KB

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  1. namespace Venus_Core
  2. {
  3. public enum VenusDevice
  4. {
  5. ValveMfc1,
  6. ValveMfc2,
  7. ValveMfc3,
  8. ValveMfc4,
  9. ValveMfc5,
  10. ValveMfc6,
  11. ValveMfc7,
  12. ValveMfc8,
  13. ValvePVN21,
  14. ValvePVN22,
  15. ValvePV11,
  16. ValvePV12,
  17. ValvePV21,
  18. ValvePV22,
  19. ValvePV31,
  20. ValvePV32,
  21. ValvePV41,
  22. ValvePV42,
  23. ValveN2,
  24. ValvePVHe1,
  25. ValvePVHe2,
  26. ValvePVHe3,
  27. ValveHeISO,
  28. ValveGasFinal,
  29. ValveSoftPump,
  30. ValveFastPump,
  31. ValveCHBPurge,
  32. ValveTurboPumpPumping,
  33. ValveTurboPumpPurge,
  34. ValveGuage,
  35. ValveLoadlockVent,
  36. ValveLoadlockPumping,
  37. MfcGas1,
  38. MfcGas2,
  39. MfcGas3,
  40. MfcGas4,
  41. MfcGas5,
  42. GasStick1,
  43. GasStick2,
  44. GasStick3,
  45. TemperatureControl,
  46. ChamberLid,
  47. ATM_SW,
  48. VAC_SW,
  49. WaterFlow_SW,
  50. N2_Pressure,
  51. ProcessGauge,
  52. PressureGauge,
  53. ForelineGauge,
  54. MainPump,
  55. Chiller,
  56. InnerChiller,
  57. OuterChiller,
  58. TopChiller,
  59. Rf,
  60. BiasRf,
  61. Match,
  62. BiasMatch,
  63. PressureControl,
  64. ThrottleValve,
  65. HeaterChamber,
  66. ForelineHeater,
  67. Heartbeat,
  68. ResetPlcSignal,
  69. LiftPin,
  70. SlitDoor,
  71. SmallPin,
  72. MediumPin,
  73. LoadLockArm,
  74. StatisticsRfOnTime,
  75. StatisticsPumpOnTime,
  76. PlcDateTime,
  77. Lid,
  78. LidLoadlock,
  79. LidLocker,
  80. ESCHV,
  81. PendulumValve,
  82. TurboPump,
  83. EndPoint,
  84. TMLid,
  85. LLALid,
  86. LLBLid,
  87. LLATSlitDoor,
  88. LLBTSlitDoor,
  89. LLAESlitDoor,
  90. LLBESlitDoor,
  91. TMValveN2,
  92. TMSoftPumpValve,
  93. TMFastPumpValve,
  94. TMPurgeValve,
  95. TMVentValve,
  96. //TMSoftVentValve,
  97. //TMFastVentValve,
  98. LLASoftPumpValve,
  99. LLAFastPumpValve,
  100. LLAPurgeValve,
  101. LLAVentValve,
  102. LLBSoftPumpValve,
  103. LLBFastPumpValve,
  104. LLBPurgeValve,
  105. LLBVentValve,
  106. ValveWaterRelay,
  107. TMPowerOn,
  108. TMInSafty,
  109. WaferLeakSensor,
  110. EFEMSideDoorClosed,
  111. TMPCWFlowSwitch,
  112. LLAPCWFlowSwitch,
  113. LLBPCWFlowSwitch,
  114. TMLidClosed,
  115. CDAPressureSwitch,
  116. VaccumPressureSwitch,
  117. N2PressureSwitch,
  118. TMPressureCtrl,
  119. TMRobotNotExtendPMA,
  120. TMRobotNotExtendPMB,
  121. TMRobotNotExtendPMC,
  122. TMRobotNotExtendPMD,
  123. TMRobotNotExtendLLA,
  124. TMRobotNotExtendLLB,
  125. EfemRobotNotExtendLLA,
  126. EfemRobotNotExtendLLB,
  127. TMVacSwitch,
  128. LLAVacSwitch,
  129. LLBVacSwitch,
  130. TMATMSwitch,
  131. LLAATMSwitch,
  132. LLBATMSwitch,
  133. LLAWaferSizeCheckSwitch,
  134. LLBWaferSizeCheckSwitch,
  135. PMAWaferSizeCheckSwitch,
  136. PMBWaferSizeCheckSwitch,
  137. PMCWaferSizeCheckSwitch,
  138. PMDWaferSizeCheckSwitch,
  139. LLASoftVentValve,
  140. LLAFastVentValve,
  141. LLBSoftVentValve,
  142. LLBFastVentValve,
  143. TMVacAtmMode,
  144. }
  145. public enum StateData
  146. {
  147. RecipeProcessTime,
  148. RecipeStepNo,
  149. RecipeStepMode,
  150. RecipeName,
  151. RecipeBaseName,
  152. RecipeStepTimeElapsed,
  153. RecipeStepTimeSetPoint,
  154. RecipeStepRfTimeSetPoint,
  155. RecipeStepElectrodeTemp,
  156. SmallWafer,
  157. MidWafer,
  158. BigWafer,
  159. RfTimeElapsed,
  160. PumpTime,
  161. PMState,
  162. TMState,
  163. IsAutoMode,
  164. IsPmOnline,
  165. IsTmOnline,
  166. PMJobState,
  167. TMJobState,
  168. PmPlatformState,
  169. JobState,
  170. JobTmRecipe,
  171. JobPmRecipe,
  172. JobStartTime,
  173. JobStopTime,
  174. JobProcessCount,
  175. IsPumpingOkForProcess,
  176. IsCoolingOkForProcess,
  177. IsGasFlowingOkForProcess,
  178. IsRfPowering,
  179. TotalCycle,
  180. ProcessStatus,
  181. AlarmEvent,
  182. LeakCheckElapseTime,
  183. DataLogName,
  184. LotName,
  185. CurrentMagazineType,
  186. SchedulerRecipe,
  187. SchedulerState,
  188. SchedulerLoadStationInSubstrate,
  189. SchedulerRailInSubstrate,
  190. SchedulerPmSubstrate,
  191. SchedulerRailOutSubstrate,
  192. SchedulerLoadStationOutSubstrate,
  193. }
  194. public enum RtOperation
  195. {
  196. DeviceOperation,
  197. LockLid,
  198. UnlockLid,
  199. StartPump,
  200. StartTurboPump,
  201. Pump,
  202. PumpLoadLock,
  203. StopPump,
  204. GasFlow,
  205. StopGasFlow,
  206. Cooling,
  207. StopCooling,
  208. /// <summary>
  209. ///
  210. /// 0:Step mode
  211. /// 1:Power on time
  212. /// 2:Electrode temperature
  213. /// 3:Electrode Critical temperature
  214. /// </summary>
  215. RfPower,
  216. Vent,
  217. VentLoadLock,
  218. Purge,
  219. PurgeLoadLock,
  220. Abort,
  221. Heat,
  222. SetConfig,
  223. SetPMBChillerState,
  224. SetHardwareConfig,
  225. LLPlace,
  226. LLPick,
  227. PMPick,
  228. PMPlace,
  229. Extend,
  230. Retract,
  231. RunRecipe,
  232. SkipCurrentStep,
  233. ResumeRecipe,
  234. AbortRecipe,
  235. Reset,
  236. LeakCheck,
  237. GasLeakCheck,
  238. DeleteLeakCheck,
  239. MFCVerification,
  240. AllMFCVerification,
  241. SwitchOffBuzzer,
  242. // Lift pin & Guide pin
  243. MoveLiftPin,
  244. MoveGuidePin,
  245. StartAutoRun,
  246. StopAutoRun,
  247. PauseAutoRun,
  248. ResumeAutoRun,
  249. InitAll,
  250. AckError,
  251. TmRun,
  252. TmStop,
  253. PmAuto,
  254. PmManual,
  255. PmOnline,
  256. PmOffline,
  257. JobAuto,
  258. JobManual,
  259. JobRun,
  260. JobStop,
  261. JobAbort,
  262. JobPmLoadRecipe,
  263. JobTmLoadRecipe,
  264. JobTmRun,
  265. JobTmStop,
  266. JobPmOnline,
  267. JobPmOffline,
  268. JobPmProcessDone,
  269. JobTmRecovered,
  270. Cycle
  271. }
  272. public enum MovementPosition
  273. {
  274. Down, Up, Left, Right, Middle, Unknown
  275. }
  276. public enum RState
  277. {
  278. Init,
  279. Running,
  280. End,
  281. Failed,
  282. Timeout,
  283. }
  284. }