SEMFPMSwapRoutine.cs 12 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357
  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.Schedulers;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using System;
  13. using System.Collections.Generic;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using System.Windows.Documents;
  18. using Venus_Core;
  19. using Venus_RT.Devices;
  20. using Venus_RT.Devices.TM;
  21. using Venus_RT.Modules.PMs;
  22. namespace Venus_RT.Modules.TM.VenusEntity
  23. {
  24. public class SEMFPMSwapRoutine : ModuleRoutineBase, IRoutine
  25. {
  26. private enum SwapStep
  27. {
  28. WaitPMReady,
  29. OpenMFSlitDoor,
  30. WaitforControlPressure,
  31. PickDelay,
  32. PreRotation,
  33. PickPrepare,
  34. PickExtend,
  35. DropDownWafer,
  36. PickDelay1,
  37. PickRetract,
  38. PlacePrepare,
  39. PlaceDelay,
  40. PlaceExtend,
  41. LiftUpWafer,
  42. PlaceDelay1,
  43. PlaceRetract,
  44. NotifyDone,
  45. CloseMFSlitDoor,
  46. EndDone,
  47. EndDelay
  48. }
  49. private readonly TMBase _TM;
  50. private readonly ITransferRobot _robot;
  51. private int _swapingTimeout = 120 * 1000;
  52. private int _placeDelayTime = 0;
  53. private int _pickDelayTime = 0;
  54. private ModuleName _targetModule;
  55. private PMEntity _pmModule;
  56. private int _targetSlot;
  57. private Hand _pickHand;
  58. private Hand _placeHand;
  59. private JetPMBase _chamber;
  60. private bool NeedControlPressure;
  61. private int _controlPressureSetPoint = 90;
  62. private int _controlFlowSetPoint = 90;
  63. public SEMFPMSwapRoutine(TMBase tm, ITransferRobot robot, ModuleName module) : base(module)
  64. {
  65. _TM = tm;
  66. _robot = robot;
  67. Name = "swap for pm";
  68. }
  69. public RState Start(params object[] objs)
  70. {
  71. if (!_robot.IsHomed)
  72. {
  73. LOG.Write(eEvent.ERR_TM, Module, $"TM Robot is not homed, please home it first");
  74. return RState.Failed;
  75. }
  76. var swapItem = (Queue<MoveItem>)objs[0];
  77. _targetModule = swapItem.Peek().SourceModule;
  78. _targetSlot = swapItem.Peek().SourceSlot;
  79. _pickHand = swapItem.Peek().RobotHand;
  80. _placeHand = _pickHand == Hand.Blade2 ? Hand.Blade1 : Hand.Blade2;
  81. if (ModuleHelper.IsPm(_targetModule) && ModuleHelper.IsInstalled(_targetModule))
  82. {
  83. _pmModule = Singleton<RouteManager>.Instance.GetPM(_targetModule);
  84. }
  85. else
  86. {
  87. LOG.Write(eEvent.ERR_TM, Module, $"Invalid target module : {_targetModule} for swap action");
  88. return RState.Failed;
  89. }
  90. if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, (int)_placeHand))
  91. {
  92. LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_placeHand} has no wafer");
  93. return RState.Failed;
  94. }
  95. if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, (int)_pickHand))
  96. {
  97. LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as TM Robot Arm: {_pickHand} has a wafer");
  98. return RState.Failed;
  99. }
  100. if (WaferManager.Instance.CheckNoWafer(_targetModule, _targetSlot))
  101. {
  102. LOG.Write(eEvent.ERR_TM, Module, $"Cannot Swap Wafer as {_targetModule} Slot {_targetSlot + 1} has no wafer");
  103. return RState.Failed;
  104. }
  105. Reset();
  106. _swapingTimeout = SC.GetValue<int>($"{Module}.SwapTimeout") * 1000;
  107. _pickDelayTime = SC.GetValue<int>($"{_targetModule}.PickDelayTime");
  108. _placeDelayTime = SC.GetValue<int>($"{_targetModule}.PlaceDelayTime");
  109. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  110. {
  111. NeedControlPressure = true;
  112. }
  113. else
  114. {
  115. NeedControlPressure = false;
  116. }
  117. return Runner.Start(Module, $"Swap with {_targetModule}");
  118. }
  119. public RState Monitor()
  120. {
  121. Runner.Wait(SwapStep.WaitPMReady, PMPrepare, _delay_60s)
  122. .Run(SwapStep.OpenMFSlitDoor, OpenSlitDoor, CheckSlitDoorOpen)
  123. .Run(SwapStep.PickPrepare, PickPrepare, IsModuleReadyForPick)
  124. .Delay(SwapStep.PickDelay, _placeDelayTime)
  125. .Run(SwapStep.PickExtend, PickExtend, WaitRobotExtendDone)
  126. .Run(SwapStep.DropDownWafer, NotifyPMPickWafer, WaitPMWaferDropDown)
  127. .Delay(SwapStep.PickDelay1, _pickDelayTime)
  128. .Run(SwapStep.PickRetract, PickRetract, WaitRobotRetractDone)
  129. .Run(SwapStep.PlacePrepare, PlacePrepare, IsModuleReadyForPlace)
  130. .Delay(SwapStep.PlaceDelay, _pickDelayTime)
  131. .Run(SwapStep.PlaceExtend, PlaceExtend, WaitRobotExtendDone)
  132. .Run(SwapStep.LiftUpWafer, NotifyLiftUpWafer, WaitPMWaferLiftUp)
  133. .Delay(SwapStep.PlaceDelay1, _placeDelayTime)
  134. .Run(SwapStep.PlaceRetract, PlaceRetract, WaitRobotRetractDone)
  135. .Run(SwapStep.CloseMFSlitDoor, CheckDoorClose, WaitPMDoorClose, 5000)
  136. .Run(SwapStep.NotifyDone, NotifyPMDone, _delay_50ms)
  137. .Delay(SwapStep.EndDelay, _delay_50ms)
  138. .End(SwapStep.EndDone, NullFun, _delay_50ms);
  139. return Runner.Status;
  140. }
  141. private bool PMPrepare()
  142. {
  143. return IsPressureReady(_targetModule)&& _pmModule.IsIdle;
  144. }
  145. private bool IsPressureReady(ModuleName _targetModule)
  146. {
  147. if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
  148. {
  149. double PMPressure = _pmModule.ChamberPressure;
  150. double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
  151. double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
  152. if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
  153. {
  154. return true;
  155. }
  156. else return false;
  157. }
  158. else return true;
  159. }
  160. private bool OpenSlitDoor()
  161. {
  162. return _TM.TurnSlitDoor(_targetModule, true);
  163. }
  164. private bool CheckSlitDoorOpen()
  165. {
  166. return _TM.CheckSlitValveOpen(_targetModule);
  167. }
  168. private bool PickPrepare()
  169. {
  170. _pmModule.PostMsg(PMEntity.MSG.PreparePick);
  171. //_TM.TurnSlitDoor(_targetModule, true);
  172. return true;
  173. }
  174. private bool PlacePrepare()
  175. {
  176. _pmModule.PostMsg(PMEntity.MSG.PreparePlace);
  177. //_TM.TurnSlitDoor(_targetModule, true);
  178. return true;
  179. }
  180. private bool IsModuleReadyForPick()
  181. {
  182. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Pick && _pmModule.IsSlitDoorOpen;
  183. }
  184. private bool PickExtend()
  185. {
  186. return _robot.PickExtend(_targetModule, _targetSlot, _pickHand);
  187. }
  188. private bool PickRetract()
  189. {
  190. return _robot.PickRetract(_targetModule, _targetSlot, _pickHand);
  191. }
  192. private bool IsModuleReadyForPlace()
  193. {
  194. return _pmModule.Status == PMEntity.PMStatus.Ready_For_Place && _pmModule.IsSlitDoorOpen;
  195. }
  196. private bool PlaceExtend()
  197. {
  198. return _robot.PlaceExtend(_targetModule, _targetSlot, _placeHand);
  199. }
  200. private bool PlaceRetract()
  201. {
  202. return _robot.PlaceRetract(_targetModule, _targetSlot, _placeHand);
  203. }
  204. private bool WaitRobotExtendDone()
  205. {
  206. if (_robot.Status == RState.Running)
  207. {
  208. return false;
  209. }
  210. else if (_robot.Status == RState.End)
  211. {
  212. return true;
  213. }
  214. else
  215. {
  216. Runner.Stop($"TM Robot Place Extend failed, {_robot.Status}");
  217. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  218. return true;
  219. }
  220. }
  221. //private bool RotateArm()
  222. //{
  223. // _pmModule.PostMsg(PMEntity.MSG.PreparePick); // Notify PM to Serv pressure in advance for throughput enhancement
  224. // return _robot.Goto(_JetTM.PreRotateModules[_targetModule], 0, _placeHand);
  225. //}
  226. //private bool WaitRotateDone()
  227. //{
  228. // if (_robot.Status == RState.Running)
  229. // {
  230. // return false;
  231. // }
  232. // else if (_robot.Status == RState.End)
  233. // {
  234. // return true;
  235. // }
  236. // else
  237. // {
  238. // Runner.Stop($"TM Robot Rotate Arm failed, {_robot.Status}");
  239. // return true;
  240. // }
  241. //}
  242. private bool NotifyPMPickWafer()
  243. {
  244. _pmModule.PostMsg(PMEntity.MSG.DropDownWafer);
  245. return true;
  246. }
  247. private bool WaitPMWaferDropDown()
  248. {
  249. if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
  250. {
  251. WaferManager.Instance.WaferMoved(_targetModule, _targetSlot, ModuleName.TMRobot, (int)_pickHand);
  252. return true;
  253. }
  254. return false;
  255. }
  256. private bool WaitRobotRetractDone()
  257. {
  258. if (_robot.Status == RState.Running)
  259. {
  260. return false;
  261. }
  262. else if (_robot.Status == RState.End)
  263. {
  264. return true;
  265. }
  266. else
  267. {
  268. Runner.Stop($"TM Robot Swap Retract failed, {_robot.Status}");
  269. Singleton<RouteManager>.Instance.GetPM(_targetModule).PostMsg(PMEntity.MSG.Error);
  270. return true;
  271. }
  272. }
  273. private bool NotifyLiftUpWafer()
  274. {
  275. _pmModule.PostMsg(PMEntity.MSG.LiftUpWafer);
  276. return true;
  277. }
  278. private bool WaitPMWaferLiftUp()
  279. {
  280. if (_pmModule.Status == PMEntity.PMStatus.Exchange_Ready)
  281. {
  282. WaferManager.Instance.WaferMoved(ModuleName.TMRobot, (int)_placeHand, _targetModule, _targetSlot);
  283. return true;
  284. }
  285. return false;
  286. }
  287. private bool NotifyPMDone()
  288. {
  289. _pmModule.PostMsg(PMEntity.MSG.PlaceReady);
  290. //_TM.TurnSlitDoor(_targetModule, false);
  291. return true;
  292. }
  293. private bool CheckDoorClose()
  294. {
  295. LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Close Door Again");
  296. return _TM.TurnSlitDoor(_targetModule, false);
  297. }
  298. private bool WaitPMDoorClose()
  299. {
  300. if (_TM.CheckSlitValveClose(_targetModule))
  301. {
  302. LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check Door Close");
  303. return true;
  304. }
  305. else
  306. {
  307. if (DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetPoint != (int)CylinderState.Close)
  308. {
  309. LOG.Write(eEvent.WARN_TM, Module, $"PMSwap {_targetModule}SlitDoor set close again");
  310. DEVICE.GetDevice<IoCylinder>($"{Module}.{_targetModule}SlitDoor").SetCylinder(false, out string reason);
  311. }
  312. //LOG.Write(eEvent.WARN_TM, Module, $"PMSwap Check not Close Door");
  313. return false;
  314. }
  315. }
  316. public void Abort()
  317. {
  318. _robot.Halt();
  319. }
  320. }
  321. }