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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using athosRT.Devices.EFEM.ABS;
- using athosRT.FSM;
- using athosRT.Modules;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using EV = athosRT.tool.EV;
- namespace athosRT.Devices.EFEM.Task
- {
- public class TransferTask : CheckImp, ITask
- {
- public bool Execute(out string result, params string[] args)
- {
- string str = "Robot";
- this.GetEntity(str);
- ModuleName target1 = ModuleName.System;
- int slot1 = 1;
- if (!this.ParseMoveTarget(args[0], out target1, out slot1))
- {
- result = "PARAM_NG";
- return false;
- }
- Hand arm1 = Hand.Blade2;
- if (!this.ParseMoveArm(args[1], out arm1))
- {
- result = "PARAM_NG";
- return false;
- }
- Hand arm2 = Hand.Blade2;
- if (!this.ParseMoveArm(args[2], out arm2))
- {
- result = "PARAM_NG";
- return false;
- }
- ModuleName target2 = ModuleName.System;
- int slot2 = 1;
- if (!this.ParseMoveTarget(args[3], out target2, out slot2))
- {
- result = "PARAM_NG";
- return false;
- }
- if (ModuleHelper.IsLoadPort(target2))
- {
- OpenStageWithWaferSizeLoadPort device = DEVICE.GetDevice<OpenStageWithWaferSizeLoadPort>(target2.ToString());
- if (slot2 == 1 && device.WaferSize == WaferSize.WS3)
- {
- EV.PostWarningLog("EFEM", string.Format("{0} is 3', slot 1 is disabled", (object)target2));
- result = "PARAM_NG";
- return false;
- }
- }
- if (ModuleHelper.IsLoadPort(target1))
- {
- OpenStageWithWaferSizeLoadPort device = DEVICE.GetDevice<OpenStageWithWaferSizeLoadPort>(target1.ToString());
- if (slot1 == 1 && device.WaferSize == WaferSize.WS3)
- {
- EV.PostWarningLog("EFEM", string.Format("{0} is 3', slot 1 is disabled", (object)target1));
- result = "PARAM_NG";
- return false;
- }
- }
- if (ModuleHelper.IsLoadLock(target1) && !SC.GetValue<bool>("System.IsLoadLockEnableZMotion"))
- {
- EV.PostWarningLog("Server", string.Format("not support LL z motion, can not TRANS {0}", (object)target1));
- result = "PARAM_NG";
- return false;
- }
- if (ModuleHelper.IsLoadLock(target2) && !SC.GetValue<bool>("System.IsLoadLockEnableZMotion"))
- {
- EV.PostWarningLog("Server", string.Format("not support LL z motion, can not TRANS {0}", (object)target2));
- result = "PARAM_NG";
- return false;
- }
- if (!this.Check<NoReadyPolicy>(str, out result) || !this.Check<NoInitCompletedPolicy>(str, out result) || !this.Check<NoOriginCompletedPolicy>(str, out result) || !this.Check<VacPolicy>(str, out result) || !this.Check<EMSPolicy>(str, out result) || !this.Check<ErrorPolicy>(str, out result) || ModuleHelper.IsLoadPort(target1) && !this.Check<NoWaferMappingCompletedPolicy>(target1.ToString(), out result) || ModuleHelper.IsLoadPort(target2) && !this.Check<NoWaferMappingCompletedPolicy>(target2.ToString(), out result))
- return false;
- if (!ModuleHelper.IsLoadLock(target2) && !Singleton<WaferManager>.Instance.CheckNoWafer(target2, slot2 - 1))
- {
- result = "WAFER";
- return false;
- }
- if (!ModuleHelper.IsLoadLock(target1) && !Singleton<WaferManager>.Instance.CheckHasWafer(target1, slot1 - 1))
- {
- result = "NONWAF";
- return false;
- }
- if (!this.Check<BusyPolicy>(str, out result) || !this.Check<HoldPolicy>(str, out result) || !this.Check<RemovePolicy>(str, out result) || !this.Check<MaintenancePolicy>(str, out result) || !this.Check<LinkPolicy>(str, out result) || !this.Check<PowerDownPolicy>(str, out result) || !this.Check<NoWaferMappingCompletedPolicy>(target1.ToString(), out result) || !this.Check<NoWaferMappingCompletedPolicy>(target2.ToString(), out result) || !this.Check<NoPodPolicy>(target1.ToString(), out result) || !this.Check<NoPodPolicy>(target2.ToString(), out result) || !this.Check<ClosePolicy>(target1.ToString(), out result) || !this.Check<ClosePolicy>(target2.ToString(), out result))
- return false;
- Singleton<RouteManager1>.Instance.InvokeMoveWafer("MoveWafer", new object[7]
- {
- (object) MoveType.Move,
- (object) MoveOption.None,
- (object) arm2,
- (object) target1,
- (object) (slot1 - 1),
- (object) target2,
- (object) (slot2 - 1)
- });
- return true;
- }
- public bool? Monitor(out string result, params string[] args)
- {
- result = string.Empty;
- RobotBaseDevice device = DEVICE.GetDevice<RobotBaseDevice>("Robot");
- if (Singleton<RouteManager1>.Instance.GetTaskState("MoveWafer") == RState.Failed)
- {
- result = "MoveFailed";
- return new bool?(false);
- }
- if (device.IsError)
- {
- this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF;
- this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL;
- this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL;
- return new bool?(CheckError("Robot", out result));
- }
- return Singleton<RouteManager1>.Instance.Running && !Singleton<RouteManager1>.Instance.IsRunning ? new bool?(true) : new bool?();
- }
- }
- }
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