using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using athosRT.Devices.EFEM.ABS; using athosRT.FSM; using athosRT.Modules; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using EV = athosRT.tool.EV; namespace athosRT.Devices.EFEM.Task { public class TransferTask : CheckImp, ITask { public bool Execute(out string result, params string[] args) { string str = "Robot"; this.GetEntity(str); ModuleName target1 = ModuleName.System; int slot1 = 1; if (!this.ParseMoveTarget(args[0], out target1, out slot1)) { result = "PARAM_NG"; return false; } Hand arm1 = Hand.Blade2; if (!this.ParseMoveArm(args[1], out arm1)) { result = "PARAM_NG"; return false; } Hand arm2 = Hand.Blade2; if (!this.ParseMoveArm(args[2], out arm2)) { result = "PARAM_NG"; return false; } ModuleName target2 = ModuleName.System; int slot2 = 1; if (!this.ParseMoveTarget(args[3], out target2, out slot2)) { result = "PARAM_NG"; return false; } if (ModuleHelper.IsLoadPort(target2)) { OpenStageWithWaferSizeLoadPort device = DEVICE.GetDevice(target2.ToString()); if (slot2 == 1 && device.WaferSize == WaferSize.WS3) { EV.PostWarningLog("EFEM", string.Format("{0} is 3', slot 1 is disabled", (object)target2)); result = "PARAM_NG"; return false; } } if (ModuleHelper.IsLoadPort(target1)) { OpenStageWithWaferSizeLoadPort device = DEVICE.GetDevice(target1.ToString()); if (slot1 == 1 && device.WaferSize == WaferSize.WS3) { EV.PostWarningLog("EFEM", string.Format("{0} is 3', slot 1 is disabled", (object)target1)); result = "PARAM_NG"; return false; } } if (ModuleHelper.IsLoadLock(target1) && !SC.GetValue("System.IsLoadLockEnableZMotion")) { EV.PostWarningLog("Server", string.Format("not support LL z motion, can not TRANS {0}", (object)target1)); result = "PARAM_NG"; return false; } if (ModuleHelper.IsLoadLock(target2) && !SC.GetValue("System.IsLoadLockEnableZMotion")) { EV.PostWarningLog("Server", string.Format("not support LL z motion, can not TRANS {0}", (object)target2)); result = "PARAM_NG"; return false; } if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || ModuleHelper.IsLoadPort(target1) && !this.Check(target1.ToString(), out result) || ModuleHelper.IsLoadPort(target2) && !this.Check(target2.ToString(), out result)) return false; if (!ModuleHelper.IsLoadLock(target2) && !Singleton.Instance.CheckNoWafer(target2, slot2 - 1)) { result = "WAFER"; return false; } if (!ModuleHelper.IsLoadLock(target1) && !Singleton.Instance.CheckHasWafer(target1, slot1 - 1)) { result = "NONWAF"; return false; } if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(target1.ToString(), out result) || !this.Check(target2.ToString(), out result) || !this.Check(target1.ToString(), out result) || !this.Check(target2.ToString(), out result) || !this.Check(target1.ToString(), out result) || !this.Check(target2.ToString(), out result)) return false; Singleton.Instance.InvokeMoveWafer("MoveWafer", new object[7] { (object) MoveType.Move, (object) MoveOption.None, (object) arm2, (object) target1, (object) (slot1 - 1), (object) target2, (object) (slot2 - 1) }); return true; } public bool? Monitor(out string result, params string[] args) { result = string.Empty; RobotBaseDevice device = DEVICE.GetDevice("Robot"); if (Singleton.Instance.GetTaskState("MoveWafer") == RState.Failed) { result = "MoveFailed"; return new bool?(false); } if (device.IsError) { this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; return new bool?(CheckError("Robot", out result)); } return Singleton.Instance.Running && !Singleton.Instance.IsRunning ? new bool?(true) : new bool?(); } } }