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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.Util;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Modules;
- using CyberX8_RT.Modules.Loader;
- using CyberX8_RT.Modules.Metal;
- using CyberX8_RT.Modules.Prewet;
- using CyberX8_RT.Modules.Transporter;
- using CyberX8_RT.Schedulers.EfemRobot;
- using MECF.Framework.Common.CommonData;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.WaferHolder;
- using MECF.Framework.RT.Core.Equipments;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Windows.Markup;
- namespace CyberX8_RT.Schedulers.Transporter
- {
- public class SchedulerProcessTransporter : SchedulerModule
- {
- #region 内部变量
- /// <summary>
- /// Process Transporter
- /// </summary>
- private TransporterEntity _processTransporterEntity;
- /// <summary>
- /// Loader transporterEntity
- /// </summary>
- private TransporterEntity _loaderTransporterEntity;
- /// <summary>
- /// 调度发送消息
- /// </summary>
- private SchedulerPostMsg _schedulerPostMsg=new SchedulerPostMsg();
- /// <summary>
- /// 推送消息结果
- /// </summary>
- private bool _postMsgResult = false;
- #endregion
- #region 属性
- /// <summary>
- /// 是否空闲
- /// </summary>
- public override bool IsIdle
- {
- get { return _state == RState.End; }
- }
- /// <summary>
- /// 是否错误
- /// </summary>
- public override bool IsError
- {
- get { return _state == RState.Failed || _state == RState.Timeout; }
- }
- public bool IsBusy
- {
- get { return _state == RState.Running; }
- }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public SchedulerProcessTransporter(ModuleName module) : base(module.ToString())
- {
- _processTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(module.ToString());
- _loaderTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
- }
- /// <summary>
- /// 执行
- /// </summary>
- /// <param name="parameter"></param>
- /// <returns></returns>
- public override bool RunProcess(object recipe, object parameter, List<SchedulerSyncModuleMessage> syncMessages)
- {
- if (parameter == null || !(parameter is WaferHolderMoveItem))
- {
- return false;
- }
- WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)parameter;
- if (waferHolderMoveItem.SourceModule != ModuleName.Unknown && waferHolderMoveItem.DestModule != ModuleName.Unknown)
- {
- SchedulerLoaderTransporter schedulerLoaderTransporter = (SchedulerLoaderTransporter)SchedulerManager.Instance.GetScheduler(ModuleName.Transporter2);
- if (schedulerLoaderTransporter.IsBusy && _loaderTransporterEntity.IsIdle)
- {
- return false;
- }
- if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.SourceModule.ToString()))
- {
- return false;
- }
- if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.DestModule.ToString()))
- {
- return false;
- }
- if (!WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.SourceModule.ToString()))
- {
- return false;
- }
- if (WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.DestModule.ToString()))
- {
- return false;
- }
- return TransferWaferHolderNonLoader(waferHolderMoveItem);
- }
- return true;
- }
- /// <summary>
- /// 传输WaferHolder(无WaferHolder)
- /// </summary>
- /// <param name="waferHolderMoveItem"></param>
- private bool TransferWaferHolderNonLoader(WaferHolderMoveItem waferHolderMoveItem)
- {
- IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(waferHolderMoveItem.DestModule.ToString());
- if (moduleEntity != null)
- {
- if (waferHolderMoveItem.SourceModule == ModuleName.Unknown || waferHolderMoveItem.DestModule == ModuleName.Unknown)
- {
- return false;
- }
- bool result = false;
- if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)
- {
- result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER,
- Module.ToString(), (int)TransporterMSG.Transfer, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
- }
- else
- {
- result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER,
- Module.ToString(), (int)TransporterMSG.PickUpMoveTo, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
- }
- if (result)
- {
- _state = RState.Running;
- _postMsgResult = false;
- _schedulerPostMsg.Reset();
- }
- return result;
- }
- return false;
- }
- /// <summary>
- /// 监控执行
- /// </summary>
- /// <returns></returns>
- public override bool MonitorProcess(SchedulerSequence schedulerSequence,bool hasMatchWafer)
- {
- WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)schedulerSequence.Parameters;
- //检验PostMsg的结果
- if (!_postMsgResult)
- {
- if (_processTransporterEntity.IsError)
- {
- return false;
- }
- _postMsgResult = CheckPostMsg(waferHolderMoveItem);
- if (!_postMsgResult)
- {
- return false;
- }
- }
- if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)
- {
- if (_processTransporterEntity.IsIdle)
- {
- if (_processTransporterEntity.WaferHolderInfo != null)
- {
- return false;
- }
- if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)
- {
- PrewetPickComplete();
- }
- _state = RState.End;
- }
- }
- else
- {
- if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)
- {
- if (_processTransporterEntity.WaferHolderInfo != null)
- {
- PrewetPickComplete();
- }
- }
- //ProcessTransporter完成PickUp和MoveTo
- if (_processTransporterEntity.State == (int)TransporterState.PickUpMoveToComplete)
- {
- MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());
- if (metalEntity != null)
- {
- //关闭FlowValve
- if (metalEntity.State == (int)MetalState.WaitCloseFlow)
- {
- metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, waferHolderMoveItem.DestModule.ToString(),
- (int)MetalMsg.CloseFlowValve);
- }
- //完成FlowValve关闭后状态变更为等待打开FlowValve,执行Place
- else if (metalEntity.State == (int)MetalState.WaitOpenFlow)
- {
- _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER, Module.ToString(),
- (int)TransporterMSG.Place, waferHolderMoveItem.DestModule.ToString());
- }
- }
- }
- //Transporter完成Place后
- else if (_processTransporterEntity.IsIdle)
- {
- if(_processTransporterEntity.WaferHolderInfo!=null)
- {
- return false;
- }
- MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());
- if (metalEntity != null)
- {
- //打开FlowValve,完成传输任务
- if (metalEntity.State == (int)MetalState.WaitOpenFlow)
- {
- bool result= metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, waferHolderMoveItem.DestModule.ToString(),
- (int)MetalMsg.OpenFlowValve);
- if(result)
- {
- _state = RState.End;
- }
- }
-
- }
- }
- }
- return true;
- }
- /// <summary>
- /// 检验PostMsg的结果
- /// </summary>
- /// <param name="waferHolderMoveItem"></param>
- /// <returns></returns>
- private bool CheckPostMsg(WaferHolderMoveItem waferHolderMoveItem)
- {
- if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)
- {
- return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,
- eEvent.WARN_TRANSPORTER, Module.ToString(), (int)TransporterMSG.PickUpMoveTo,
- (int)TransporterState.PickUpMoveToing, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
- }
- else
- {
- return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,
- eEvent.WARN_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Transfer,
- (int)TransporterState.Transfering, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
- }
- }
- /// <summary>
- /// PrewetPick完成事件
- /// </summary>
- private void PrewetPickComplete()
- {
- PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());
- if (prewetEntity.State == (int)PrewetState.WaitForPick)
- {
- prewetEntity.CheckToPostMessage<PrewetState, PrewetMsg>(eEvent.WARN_PREWET, ModuleName.Prewet1.ToString(),
- (int)PrewetMsg.PickComplete);
- }
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <param name="sequenceIndex"></param>
- /// <param name="parameter"></param>
- /// <returns></returns>
- public override bool CheckPrecondition(List<SchedulerSequence> schedulerSequences, int sequenceIndex, object parameter, string materialId,ref string reason)
- {
- if (!(parameter is WaferHolderMoveItem))
- {
- reason = "parameter is not WaferHolderMoveItem";
- return false;
- }
- if (_state == RState.Running)
- {
- reason = "scheduler module is already running";
- return false;
- }
- if (_processTransporterEntity.WaferHolderInfo != null)
- {
- reason = "process transporter has wafer shuttle";
- return false;
- }
- //电机是否还在执行动作
- JetAxisBase gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Gantry");
- if(gantryAxis==null)
- {
- reason = "process transporter gantry is null";
- return false;
- }
- if (gantryAxis.Status == RState.Running)
- {
- reason = "process transporter gantry is running";
- return false;
- }
- JetAxisBase elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Elevator");
- if (elevatorAxis == null)
- {
- reason = "process transporter elevator is null";
- return false;
- }
- if (elevatorAxis.Status == RState.Running)
- {
- reason = "process transporter elevator is running";
- return false;
- }
- if (_processTransporterEntity.IsBusy)
- {
- reason = "process transporter entity is busy";
- return false;
- }
- WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)parameter;
- bool result = false;
- //更新未知源模块
- UpdateUnkownSourceModule(schedulerSequences, waferHolderMoveItem, sequenceIndex);
- //源为Prewet
- if (waferHolderMoveItem.SourceModule == ModuleName.Prewet1)
- {
- result= CheckSourcePrewetCondition();
- if(!result)
- {
- reason = "process transporter sourcemodule prewet condition is not avaible";
- return false;
- }
- }
- bool existEnableCell = false;
- //更新未知目标模块
- result = UpdateUnkownTargetModule(schedulerSequences, waferHolderMoveItem, sequenceIndex,materialId,ref existEnableCell);
- if (!result)
- {
- reason = "process transporter moveitem target module is unknown";
- return false;
- }
- if (waferHolderMoveItem.DestModuleType==ModuleType.Metal)
- {
- if(!ModuleHelper.IsMetal(waferHolderMoveItem.DestModule))
- {
- reason = "process transporter target module is not metal";
- return false;
- }
- UpdateNextMetalScheduler(schedulerSequences, sequenceIndex, waferHolderMoveItem.DestModule);
-
- result= CheckTargetMetalCondition(waferHolderMoveItem.DestModule.ToString(),waferHolderMoveItem, schedulerSequences, sequenceIndex);
- if(!result)
- {
- reason = $"process transporter target module {waferHolderMoveItem.DestModule} condition is false";
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// 更新下一块Metal
- /// </summary>
- /// <param name="schedulerSequences"></param>
- /// <param name="sequenceIndex"></param>
- private void UpdateNextMetalScheduler(List<SchedulerSequence> schedulerSequences,int sequenceIndex,ModuleName metalName)
- {
- if(sequenceIndex+1<schedulerSequences.Count)
- {
- SchedulerSequence nextSchedulerSequence=schedulerSequences[sequenceIndex+1];
- if(nextSchedulerSequence.SchedulerModule==null)
- {
- nextSchedulerSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(metalName);
- nextSchedulerSequence.ModuleName = metalName;
- }
- }
- }
- /// <summary>
- /// 更新未知目标模块
- /// </summary>
- private bool UpdateUnkownTargetModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex,string materialId,ref bool existEnableCell)
- {
- if (waferHolderMoveItem.DestModule == ModuleName.Unknown)
- {
- if (sequenceIndex + 1 < schedulerSequences.Count)
- {
- SchedulerSequence sequence = schedulerSequences[sequenceIndex + 1];
- ModuleName moduleName = ModuleName.Unknown;
- if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)
- {
- if (sequence.Recipe != null && sequence.Recipe is DepRecipe)
- {
- //获取可用的Metal以及Rinse
- DepRecipe depRecipe = (DepRecipe)sequence.Recipe;
- ModuleName tmpName = SchedulerSequenceManager.Instance.CalculateAvaibleMetalCellByChemistry(depRecipe.Chemistry,
- waferHolderMoveItem.SourceModule.ToString(),sequence.SequenceType,ref existEnableCell);
- if (tmpName != ModuleName.Unknown)
- {
- IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(tmpName.ToString());
- if (SchedulerSequenceManager.Instance.CheckMetalCellRecipeTimeAvaible(moduleEntity, depRecipe))
- {
- moduleName = tmpName;
- }
- }
- }
- }
- else if(waferHolderMoveItem.DestModuleType==ModuleType.Rinse)
- {
- if (waferHolderMoveItem.SourceModuleType == ModuleType.Metal)
- {
- moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,sequence.SequenceType,waferHolderMoveItem.SourceModule);
- }
- else
- {
- for(int i = sequenceIndex - 1; i >= 0; i--)
- {
- SchedulerSequence tmp=schedulerSequences[i];
- if (tmp.ModuleType == ModuleType.Metal&&ModuleHelper.IsMetal(tmp.ModuleName))
- {
- moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,tmp.SequenceType, tmp.ModuleName);
- break;
- }
- }
- }
- }
- else
- {
- moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,sequence.SequenceType,waferHolderMoveItem.SourceModule);
- }
- if (moduleName == ModuleName.Unknown)
- {
- return false;
- }
- else
- {
- LOG.WriteLog(eEvent.EV_SCHEDULER, Module.ToString(), $"{materialId} ProcessTransporter Confirm Next Cell {moduleName}");
- waferHolderMoveItem.DestModule = moduleName;
- if (sequence.SchedulerModule == null)
- {
- sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(moduleName);
- sequence.ModuleName = moduleName;
- }
- }
- }
- }
- return true;
- }
- /// <summary>
- /// 更新未知源模块
- /// </summary>
- private void UpdateUnkownSourceModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex)
- {
- if (waferHolderMoveItem.SourceModule == ModuleName.Unknown)
- {
- for (int i = sequenceIndex - 1; i >= 0; i--)
- {
- SchedulerSequence preSchedulerSequence = schedulerSequences[i];
- if (preSchedulerSequence.State == RState.End)
- {
- if (i == sequenceIndex - 1)
- {
- if (preSchedulerSequence != null && preSchedulerSequence.SchedulerModule != null)
- {
- waferHolderMoveItem.SourceModule = preSchedulerSequence.SchedulerModule.Module;
- break;
- }
- }
- else
- {
- //用于Metal出错后跳过了几个步骤,transporter源模块取至前面跳过的transporter1的目标模块
- if(preSchedulerSequence.ModuleName==ModuleName.Transporter1)
- {
- WaferHolderMoveItem preWaferHolderMoveItem = preSchedulerSequence.Parameters as WaferHolderMoveItem;
- if (preSchedulerSequence != null && preWaferHolderMoveItem.DestModule!=ModuleName.Unknown)
- {
- waferHolderMoveItem.SourceModule = preWaferHolderMoveItem.DestModule;
- break;
- }
- }
- }
- }
- }
- }
- }
- /// <summary>
- /// 检验源Prewet前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckSourcePrewetCondition()
- {
- PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());
- if (prewetEntity.State == (int)PrewetState.WaitForPick)
- {
- return true;
- }
- return false;
- }
- /// <summary>
- /// 检验目标Metal前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckTargetMetalCondition(string metalName,WaferHolderMoveItem waferHolderMoveItem,List<SchedulerSequence> schedulerSequences,int sequenceIndex)
- {
- MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(metalName);
- if (metalEntity.IsIdle)
- {
- metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, metalName,
- (int)MetalMsg.CurrentShortTest);
- }
- else if (metalEntity.State == (int)MetalState.WaitCloseFlow)
- {
- return true;
- }
- else if (metalEntity.IsError)
- {
- waferHolderMoveItem.DestModule = ModuleName.Unknown;
- SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
- if (nextSequence != null)
- {
- nextSequence.SchedulerModule = null;
- nextSequence.ModuleName = ModuleName.Unknown;
- }
- }
- return false;
- }
- public override void ResetTask()
- {
- base.ResetTask();
- _schedulerPostMsg.Reset();
- _postMsgResult = false;
- }
- }
- }
|