SchedulerProcessTransporter.cs 24 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using CyberX8_Core;
  6. using CyberX8_RT.Devices.AXIS;
  7. using CyberX8_RT.Modules;
  8. using CyberX8_RT.Modules.Loader;
  9. using CyberX8_RT.Modules.Metal;
  10. using CyberX8_RT.Modules.Prewet;
  11. using CyberX8_RT.Modules.Transporter;
  12. using CyberX8_RT.Schedulers.EfemRobot;
  13. using MECF.Framework.Common.CommonData;
  14. using MECF.Framework.Common.Equipment;
  15. using MECF.Framework.Common.RecipeCenter;
  16. using MECF.Framework.Common.Schedulers;
  17. using MECF.Framework.Common.WaferHolder;
  18. using MECF.Framework.RT.Core.Equipments;
  19. using System;
  20. using System.Collections.Generic;
  21. using System.Linq;
  22. using System.Text;
  23. using System.Threading.Tasks;
  24. using System.Windows.Markup;
  25. namespace CyberX8_RT.Schedulers.Transporter
  26. {
  27. public class SchedulerProcessTransporter : SchedulerModule
  28. {
  29. #region 内部变量
  30. /// <summary>
  31. /// Process Transporter
  32. /// </summary>
  33. private TransporterEntity _processTransporterEntity;
  34. /// <summary>
  35. /// Loader transporterEntity
  36. /// </summary>
  37. private TransporterEntity _loaderTransporterEntity;
  38. /// <summary>
  39. /// 调度发送消息
  40. /// </summary>
  41. private SchedulerPostMsg _schedulerPostMsg=new SchedulerPostMsg();
  42. /// <summary>
  43. /// 推送消息结果
  44. /// </summary>
  45. private bool _postMsgResult = false;
  46. #endregion
  47. #region 属性
  48. /// <summary>
  49. /// 是否空闲
  50. /// </summary>
  51. public override bool IsIdle
  52. {
  53. get { return _state == RState.End; }
  54. }
  55. /// <summary>
  56. /// 是否错误
  57. /// </summary>
  58. public override bool IsError
  59. {
  60. get { return _state == RState.Failed || _state == RState.Timeout; }
  61. }
  62. public bool IsBusy
  63. {
  64. get { return _state == RState.Running; }
  65. }
  66. #endregion
  67. /// <summary>
  68. /// 构造函数
  69. /// </summary>
  70. /// <param name="module"></param>
  71. public SchedulerProcessTransporter(ModuleName module) : base(module.ToString())
  72. {
  73. _processTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(module.ToString());
  74. _loaderTransporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
  75. }
  76. /// <summary>
  77. /// 执行
  78. /// </summary>
  79. /// <param name="parameter"></param>
  80. /// <returns></returns>
  81. public override bool RunProcess(object recipe, object parameter, List<SchedulerSyncModuleMessage> syncMessages)
  82. {
  83. if (parameter == null || !(parameter is WaferHolderMoveItem))
  84. {
  85. return false;
  86. }
  87. WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)parameter;
  88. if (waferHolderMoveItem.SourceModule != ModuleName.Unknown && waferHolderMoveItem.DestModule != ModuleName.Unknown)
  89. {
  90. SchedulerLoaderTransporter schedulerLoaderTransporter = (SchedulerLoaderTransporter)SchedulerManager.Instance.GetScheduler(ModuleName.Transporter2);
  91. if (schedulerLoaderTransporter.IsBusy && _loaderTransporterEntity.IsIdle)
  92. {
  93. return false;
  94. }
  95. if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.SourceModule.ToString()))
  96. {
  97. return false;
  98. }
  99. if (!_processTransporterEntity.CheckOtherEntityStatus(waferHolderMoveItem.DestModule.ToString()))
  100. {
  101. return false;
  102. }
  103. if (!WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.SourceModule.ToString()))
  104. {
  105. return false;
  106. }
  107. if (WaferHolderManager.Instance.HasWaferHolder(waferHolderMoveItem.DestModule.ToString()))
  108. {
  109. return false;
  110. }
  111. return TransferWaferHolderNonLoader(waferHolderMoveItem);
  112. }
  113. return true;
  114. }
  115. /// <summary>
  116. /// 传输WaferHolder(无WaferHolder)
  117. /// </summary>
  118. /// <param name="waferHolderMoveItem"></param>
  119. private bool TransferWaferHolderNonLoader(WaferHolderMoveItem waferHolderMoveItem)
  120. {
  121. IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(waferHolderMoveItem.DestModule.ToString());
  122. if (moduleEntity != null)
  123. {
  124. if (waferHolderMoveItem.SourceModule == ModuleName.Unknown || waferHolderMoveItem.DestModule == ModuleName.Unknown)
  125. {
  126. return false;
  127. }
  128. bool result = false;
  129. if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)
  130. {
  131. result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER,
  132. Module.ToString(), (int)TransporterMSG.Transfer, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  133. }
  134. else
  135. {
  136. result = _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER,
  137. Module.ToString(), (int)TransporterMSG.PickUpMoveTo, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  138. }
  139. if (result)
  140. {
  141. _state = RState.Running;
  142. _postMsgResult = false;
  143. _schedulerPostMsg.Reset();
  144. }
  145. return result;
  146. }
  147. return false;
  148. }
  149. /// <summary>
  150. /// 监控执行
  151. /// </summary>
  152. /// <returns></returns>
  153. public override bool MonitorProcess(SchedulerSequence schedulerSequence,bool hasMatchWafer)
  154. {
  155. WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)schedulerSequence.Parameters;
  156. //检验PostMsg的结果
  157. if (!_postMsgResult)
  158. {
  159. if (_processTransporterEntity.IsError)
  160. {
  161. return false;
  162. }
  163. _postMsgResult = CheckPostMsg(waferHolderMoveItem);
  164. if (!_postMsgResult)
  165. {
  166. return false;
  167. }
  168. }
  169. if (waferHolderMoveItem.DestModuleType != ModuleType.Metal)
  170. {
  171. if (_processTransporterEntity.IsIdle)
  172. {
  173. if (_processTransporterEntity.WaferHolderInfo != null)
  174. {
  175. return false;
  176. }
  177. if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)
  178. {
  179. PrewetPickComplete();
  180. }
  181. _state = RState.End;
  182. }
  183. }
  184. else
  185. {
  186. if (waferHolderMoveItem.SourceModuleType == ModuleType.Prewet)
  187. {
  188. if (_processTransporterEntity.WaferHolderInfo != null)
  189. {
  190. PrewetPickComplete();
  191. }
  192. }
  193. //ProcessTransporter完成PickUp和MoveTo
  194. if (_processTransporterEntity.State == (int)TransporterState.PickUpMoveToComplete)
  195. {
  196. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());
  197. if (metalEntity != null)
  198. {
  199. //关闭FlowValve
  200. if (metalEntity.State == (int)MetalState.WaitCloseFlow)
  201. {
  202. metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, waferHolderMoveItem.DestModule.ToString(),
  203. (int)MetalMsg.CloseFlowValve);
  204. }
  205. //完成FlowValve关闭后状态变更为等待打开FlowValve,执行Place
  206. else if (metalEntity.State == (int)MetalState.WaitOpenFlow)
  207. {
  208. _processTransporterEntity.CheckToPostMessage<TransporterState, TransporterMSG>(eEvent.WARN_TRANSPORTER, Module.ToString(),
  209. (int)TransporterMSG.Place, waferHolderMoveItem.DestModule.ToString());
  210. }
  211. }
  212. }
  213. //Transporter完成Place后
  214. else if (_processTransporterEntity.IsIdle)
  215. {
  216. if(_processTransporterEntity.WaferHolderInfo!=null)
  217. {
  218. return false;
  219. }
  220. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(waferHolderMoveItem.DestModule.ToString());
  221. if (metalEntity != null)
  222. {
  223. //打开FlowValve,完成传输任务
  224. if (metalEntity.State == (int)MetalState.WaitOpenFlow)
  225. {
  226. bool result= metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, waferHolderMoveItem.DestModule.ToString(),
  227. (int)MetalMsg.OpenFlowValve);
  228. if(result)
  229. {
  230. _state = RState.End;
  231. }
  232. }
  233. }
  234. }
  235. }
  236. return true;
  237. }
  238. /// <summary>
  239. /// 检验PostMsg的结果
  240. /// </summary>
  241. /// <param name="waferHolderMoveItem"></param>
  242. /// <returns></returns>
  243. private bool CheckPostMsg(WaferHolderMoveItem waferHolderMoveItem)
  244. {
  245. if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)
  246. {
  247. return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,
  248. eEvent.WARN_TRANSPORTER, Module.ToString(), (int)TransporterMSG.PickUpMoveTo,
  249. (int)TransporterState.PickUpMoveToing, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  250. }
  251. else
  252. {
  253. return _schedulerPostMsg.PostMsg<TransporterState, TransporterMSG>(_processTransporterEntity, _processTransporterEntity.State,
  254. eEvent.WARN_TRANSPORTER, Module.ToString(), (int)TransporterMSG.Transfer,
  255. (int)TransporterState.Transfering, waferHolderMoveItem.SourceModule.ToString(), waferHolderMoveItem.DestModule.ToString());
  256. }
  257. }
  258. /// <summary>
  259. /// PrewetPick完成事件
  260. /// </summary>
  261. private void PrewetPickComplete()
  262. {
  263. PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());
  264. if (prewetEntity.State == (int)PrewetState.WaitForPick)
  265. {
  266. prewetEntity.CheckToPostMessage<PrewetState, PrewetMsg>(eEvent.WARN_PREWET, ModuleName.Prewet1.ToString(),
  267. (int)PrewetMsg.PickComplete);
  268. }
  269. }
  270. /// <summary>
  271. /// 检验前置条件
  272. /// </summary>
  273. /// <param name="sequenceIndex"></param>
  274. /// <param name="parameter"></param>
  275. /// <returns></returns>
  276. public override bool CheckPrecondition(List<SchedulerSequence> schedulerSequences, int sequenceIndex, object parameter, string materialId,ref string reason)
  277. {
  278. if (!(parameter is WaferHolderMoveItem))
  279. {
  280. reason = "parameter is not WaferHolderMoveItem";
  281. return false;
  282. }
  283. if (_state == RState.Running)
  284. {
  285. reason = "scheduler module is already running";
  286. return false;
  287. }
  288. if (_processTransporterEntity.WaferHolderInfo != null)
  289. {
  290. reason = "process transporter has wafer shuttle";
  291. return false;
  292. }
  293. //电机是否还在执行动作
  294. JetAxisBase gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Gantry");
  295. if(gantryAxis==null)
  296. {
  297. reason = "process transporter gantry is null";
  298. return false;
  299. }
  300. if (gantryAxis.Status == RState.Running)
  301. {
  302. reason = "process transporter gantry is running";
  303. return false;
  304. }
  305. JetAxisBase elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter1}.Elevator");
  306. if (elevatorAxis == null)
  307. {
  308. reason = "process transporter elevator is null";
  309. return false;
  310. }
  311. if (elevatorAxis.Status == RState.Running)
  312. {
  313. reason = "process transporter elevator is running";
  314. return false;
  315. }
  316. if (_processTransporterEntity.IsBusy)
  317. {
  318. reason = "process transporter entity is busy";
  319. return false;
  320. }
  321. WaferHolderMoveItem waferHolderMoveItem = (WaferHolderMoveItem)parameter;
  322. bool result = false;
  323. //更新未知源模块
  324. UpdateUnkownSourceModule(schedulerSequences, waferHolderMoveItem, sequenceIndex);
  325. //源为Prewet
  326. if (waferHolderMoveItem.SourceModule == ModuleName.Prewet1)
  327. {
  328. result= CheckSourcePrewetCondition();
  329. if(!result)
  330. {
  331. reason = "process transporter sourcemodule prewet condition is not avaible";
  332. return false;
  333. }
  334. }
  335. bool existEnableCell = false;
  336. //更新未知目标模块
  337. result = UpdateUnkownTargetModule(schedulerSequences, waferHolderMoveItem, sequenceIndex,materialId,ref existEnableCell);
  338. if (!result)
  339. {
  340. reason = "process transporter moveitem target module is unknown";
  341. return false;
  342. }
  343. if (waferHolderMoveItem.DestModuleType==ModuleType.Metal)
  344. {
  345. if(!ModuleHelper.IsMetal(waferHolderMoveItem.DestModule))
  346. {
  347. reason = "process transporter target module is not metal";
  348. return false;
  349. }
  350. UpdateNextMetalScheduler(schedulerSequences, sequenceIndex, waferHolderMoveItem.DestModule);
  351. result= CheckTargetMetalCondition(waferHolderMoveItem.DestModule.ToString(),waferHolderMoveItem, schedulerSequences, sequenceIndex);
  352. if(!result)
  353. {
  354. reason = $"process transporter target module {waferHolderMoveItem.DestModule} condition is false";
  355. return false;
  356. }
  357. }
  358. return true;
  359. }
  360. /// <summary>
  361. /// 更新下一块Metal
  362. /// </summary>
  363. /// <param name="schedulerSequences"></param>
  364. /// <param name="sequenceIndex"></param>
  365. private void UpdateNextMetalScheduler(List<SchedulerSequence> schedulerSequences,int sequenceIndex,ModuleName metalName)
  366. {
  367. if(sequenceIndex+1<schedulerSequences.Count)
  368. {
  369. SchedulerSequence nextSchedulerSequence=schedulerSequences[sequenceIndex+1];
  370. if(nextSchedulerSequence.SchedulerModule==null)
  371. {
  372. nextSchedulerSequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(metalName);
  373. nextSchedulerSequence.ModuleName = metalName;
  374. }
  375. }
  376. }
  377. /// <summary>
  378. /// 更新未知目标模块
  379. /// </summary>
  380. private bool UpdateUnkownTargetModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex,string materialId,ref bool existEnableCell)
  381. {
  382. if (waferHolderMoveItem.DestModule == ModuleName.Unknown)
  383. {
  384. if (sequenceIndex + 1 < schedulerSequences.Count)
  385. {
  386. SchedulerSequence sequence = schedulerSequences[sequenceIndex + 1];
  387. ModuleName moduleName = ModuleName.Unknown;
  388. if (waferHolderMoveItem.DestModuleType == ModuleType.Metal)
  389. {
  390. if (sequence.Recipe != null && sequence.Recipe is DepRecipe)
  391. {
  392. //获取可用的Metal以及Rinse
  393. DepRecipe depRecipe = (DepRecipe)sequence.Recipe;
  394. ModuleName tmpName = SchedulerSequenceManager.Instance.CalculateAvaibleMetalCellByChemistry(depRecipe.Chemistry,
  395. waferHolderMoveItem.SourceModule.ToString(),sequence.SequenceType,ref existEnableCell);
  396. if (tmpName != ModuleName.Unknown)
  397. {
  398. IModuleEntity moduleEntity = Singleton<RouteManager>.Instance.GetModule<IModuleEntity>(tmpName.ToString());
  399. if (SchedulerSequenceManager.Instance.CheckMetalCellRecipeTimeAvaible(moduleEntity, depRecipe))
  400. {
  401. moduleName = tmpName;
  402. }
  403. }
  404. }
  405. }
  406. else if(waferHolderMoveItem.DestModuleType==ModuleType.Rinse)
  407. {
  408. if (waferHolderMoveItem.SourceModuleType == ModuleType.Metal)
  409. {
  410. moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,sequence.SequenceType,waferHolderMoveItem.SourceModule);
  411. }
  412. else
  413. {
  414. for(int i = sequenceIndex - 1; i >= 0; i--)
  415. {
  416. SchedulerSequence tmp=schedulerSequences[i];
  417. if (tmp.ModuleType == ModuleType.Metal&&ModuleHelper.IsMetal(tmp.ModuleName))
  418. {
  419. moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,tmp.SequenceType, tmp.ModuleName);
  420. break;
  421. }
  422. }
  423. }
  424. }
  425. else
  426. {
  427. moduleName = SchedulerSequenceManager.Instance.GetAvaibleEmptyModuleCell(waferHolderMoveItem.DestModuleType,sequence.SequenceType,waferHolderMoveItem.SourceModule);
  428. }
  429. if (moduleName == ModuleName.Unknown)
  430. {
  431. return false;
  432. }
  433. else
  434. {
  435. LOG.WriteLog(eEvent.EV_SCHEDULER, Module.ToString(), $"{materialId} ProcessTransporter Confirm Next Cell {moduleName}");
  436. waferHolderMoveItem.DestModule = moduleName;
  437. if (sequence.SchedulerModule == null)
  438. {
  439. sequence.SchedulerModule = SchedulerManager.Instance.GetScheduler(moduleName);
  440. sequence.ModuleName = moduleName;
  441. }
  442. }
  443. }
  444. }
  445. return true;
  446. }
  447. /// <summary>
  448. /// 更新未知源模块
  449. /// </summary>
  450. private void UpdateUnkownSourceModule(List<SchedulerSequence> schedulerSequences, WaferHolderMoveItem waferHolderMoveItem, int sequenceIndex)
  451. {
  452. if (waferHolderMoveItem.SourceModule == ModuleName.Unknown)
  453. {
  454. for (int i = sequenceIndex - 1; i >= 0; i--)
  455. {
  456. SchedulerSequence preSchedulerSequence = schedulerSequences[i];
  457. if (preSchedulerSequence.State == RState.End)
  458. {
  459. if (i == sequenceIndex - 1)
  460. {
  461. if (preSchedulerSequence != null && preSchedulerSequence.SchedulerModule != null)
  462. {
  463. waferHolderMoveItem.SourceModule = preSchedulerSequence.SchedulerModule.Module;
  464. break;
  465. }
  466. }
  467. else
  468. {
  469. //用于Metal出错后跳过了几个步骤,transporter源模块取至前面跳过的transporter1的目标模块
  470. if(preSchedulerSequence.ModuleName==ModuleName.Transporter1)
  471. {
  472. WaferHolderMoveItem preWaferHolderMoveItem = preSchedulerSequence.Parameters as WaferHolderMoveItem;
  473. if (preSchedulerSequence != null && preWaferHolderMoveItem.DestModule!=ModuleName.Unknown)
  474. {
  475. waferHolderMoveItem.SourceModule = preWaferHolderMoveItem.DestModule;
  476. break;
  477. }
  478. }
  479. }
  480. }
  481. }
  482. }
  483. }
  484. /// <summary>
  485. /// 检验源Prewet前置条件
  486. /// </summary>
  487. /// <returns></returns>
  488. private bool CheckSourcePrewetCondition()
  489. {
  490. PrewetEntity prewetEntity = Singleton<RouteManager>.Instance.GetModule<PrewetEntity>(ModuleName.Prewet1.ToString());
  491. if (prewetEntity.State == (int)PrewetState.WaitForPick)
  492. {
  493. return true;
  494. }
  495. return false;
  496. }
  497. /// <summary>
  498. /// 检验目标Metal前置条件
  499. /// </summary>
  500. /// <returns></returns>
  501. private bool CheckTargetMetalCondition(string metalName,WaferHolderMoveItem waferHolderMoveItem,List<SchedulerSequence> schedulerSequences,int sequenceIndex)
  502. {
  503. MetalEntity metalEntity = Singleton<RouteManager>.Instance.GetModule<MetalEntity>(metalName);
  504. if (metalEntity.IsIdle)
  505. {
  506. metalEntity.CheckToPostMessage<MetalState, MetalMsg>(eEvent.WARN_METAL, metalName,
  507. (int)MetalMsg.CurrentShortTest);
  508. }
  509. else if (metalEntity.State == (int)MetalState.WaitCloseFlow)
  510. {
  511. return true;
  512. }
  513. else if (metalEntity.IsError)
  514. {
  515. waferHolderMoveItem.DestModule = ModuleName.Unknown;
  516. SchedulerSequence nextSequence = schedulerSequences[sequenceIndex + 1];
  517. if (nextSequence != null)
  518. {
  519. nextSequence.SchedulerModule = null;
  520. nextSequence.ModuleName = ModuleName.Unknown;
  521. }
  522. }
  523. return false;
  524. }
  525. public override void ResetTask()
  526. {
  527. base.ResetTask();
  528. _schedulerPostMsg.Reset();
  529. _postMsgResult = false;
  530. }
  531. }
  532. }